Neural network control system and method of magnetic suspension molecular pump

Abstract

The invention discloses a neural network control system and method of a magnetic suspension molecular pump. The neural network control system comprises a data acquisition and storage unit and a regulation and control unit, wherein the data acquisition and storage unit collects and stores the installation angle alpha and the installation angle beta of each preset installation position, rotor position deviation E and the rotor position deviation change rate EC as well as radial magnetic bearing bias current, axial magnetic bearing bias current and a PID (proportion integration differentiation) control parameter for causing the molecular pump to stably operate; the regulation and control unit trains a neural network model according to the parameter obtained by the data acquisition and storage unit; when the magnetic suspension molecular pump is installed at any position, the current alpha, the beta, the E and the EC obtained by measurement and calculation are input to the trained neural network model; the neural network control method is used for obtaining the radial magnetic bearing bias current, the axial magnetic bearing bias current and the magnetic bearing PID control parameter of the magnetic suspension molecular pump at the time. Thus, the neural network control system can stably work when the molecular pump is installed at any position, and is suitable for solving the technical problem of installing the magnetic suspension molecular pump at any position.

Description

technical field [0001] The invention relates to the field of fluid equipment, in particular to a neural network control system and method capable of installing a magnetic levitation molecular pump at any position. Background technique [0002] The magnetic suspension molecular pump is a new type of high-performance molecular pump that uses magnetic bearings to generate electromagnetic force to suspend the rotor in the air, so that there is no mechanical contact between the rotor and the stator, and the rotor position can be actively controlled. Because the magnetic levitation molecular pump has the advantages of no friction, no lubrication, no pollution, high speed, long life, etc., the magnetic levitation molecular pump is widely used in the field of vacuum acquisition with high vacuum and high cleanliness. [0003] The load of the magnetic levitation molecular pump is shared by the radial magnetic bearing and the axial magnetic bearing. During the working process, the mag...

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Problems solved by technology

[0006] For this reason, the technical problem to be solved by the present invention is that the existing magnetic levitation molecular pump control program cannot adjust the radial magnetic bearing bias current, axial magnetic bearing bias current and related control parameters in real time according to the change of the molecular pump installation position, thus proposing Neural network control system and control method of a magnetic levitation molecular pump

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