Non-contact type of vacuum pad
A non-contact, vacuum pad technology, used in furnaces, charge control, lighting and heating equipment, etc., can solve the problems of complex installation structure vacuum pump design and energy consumption, and achieve the effect of reliable processing and high vacuum degree
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[0030] For the features and effects of the present invention described above or not described, reference will be made to Figure 3 to Figure 5 Embodiments of the present invention will be described in detail.
[0031] Such as image 3 As shown, the non-contact vacuum pad of the present invention is indicated by reference numeral 10 . The vacuum pad 10 includes: a body 11 ; a flow guide member 12 combined with the lower part of the body 11 ; and a compressed air discharge channel formed between the body 11 and the flow guide member 12 . Here, the above-mentioned body 11 includes: a compressed air supply hole 13 formed at the center of the body 11 ; and an outward diffusion surface 14 formed at the lower end of the above-mentioned supply hole 13 . This part does not differ from the prior art. However, the above-mentioned outward diffusing surface can be selected as an inclined surface or an annular surface.
[0032] The flow guiding member 12 does not protrude along the lowe...
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