Quick measurement system for circular trace motion error based on sweep frequency laser interference

Abstract

The invention discloses a quick measurement system for a circular trace motion error based on sweep frequency laser interference. The system comprises a sweep frequency laser, a target lens, a detection mechanism and a general spectroscope, wherein the detection mechanism comprises an X-direction detection mechanism and a Y-direction detection mechanism; each detection mechanisms comprises a sub-spectroscope, a reflector, a photoelectric detector, a counter and a processor; a first light splitting signal faces to the target lens, and a second light splitting signal faces to the reflector; thefirst light splitting signal is reflected by the target lens to form a first reflected signal; the second light splitting signal is reflected by the reflector to form a second reflected signal; and the first reflected signal and the second reflected signal are converged at the sub-spectroscope to generate an interference signal. The invention has the advantages that: the measurement result is notinfluenced even when the detection light path is blocked during the measurement, absolute displacement can be measured, and the instrument is easy to calibrate and correct.

Description

technical field [0001] The invention relates to an optical measuring instrument, in particular to a rapid detection system for circular track motion errors of machine tool guide rails. technical background [0002] One of the effective methods to evaluate the machining accuracy of machine tools is to measure the circular motion trajectory. Circular track motion is one of the common forms of motion in machining, which uses the linkage of two axes to achieve the required track. The object of the present invention is to develop a machine tool circular track motion error detection system based on frequency-sweeping laser interference. [0003] At present, there are mainly reference disc method, planar orthogonal grating method, Doppler laser measurement method, double-gauge ball bar instrument, etc. to detect the circular trajectory motion error of machine tools. The reference disc method cannot accurately calculate and distinguish the single parameter error in the circular tr...

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the shortcomings of the existing technology that the detection optical path cannot be blocked during the measurement process, the environment is greatly disturbed, only the relative displacement can be measured, and the calibration and correction of the instrument are complicated. It will not affect the measurement results even if it is broken, the absolute displacement can be measured, the calibration and correction of the instrument is simple, and the circular track motion error rapid measurement system based on frequency-sweeping laser interference

Images