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Measurement sensor

A technology for measuring sensors and measuring elements, applied in the field of measuring sensors

Active Publication Date: 2011-05-11
VEGA GRIESHABER GMBH & CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, the disadvantage of the aforementioned compensation method is that the presence of a thermal shock can only be detected with the aid of spurious measured values ​​and therefore a very fast signal processing of the measured values ​​is required.
Furthermore, it is problematic that it is not possible to reliably identify and process events superimposed in time, such as the superimposition of a pressure shock and a thermal shock

Method used

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Embodiment Construction

[0032] figure 1 A first embodiment of a measuring sensor 1 according to the invention is shown, the measuring sensor comprising a base body 3, a measuring diaphragm 5 arranged on the base body 3 via a welding ring 16, and the measuring diaphragm 5 and the base body 3 The measuring electrodes 10, 11. A gap 12 formed between the measuring diaphragm 5 and the base body 3 is connected via a channel 13 to a pressure equalization device 15 , which in this embodiment is formed by a pressure equalization diaphragm 17 via a connecting layer 18 Connected to the back of base body 3. The pressure compensation device 15 has a further gap 14 between the pressure compensation membrane 17 and the back side of the base body 3, which serves to ensure an isobaric pressure situation inside the measuring sensor 1 ( ). Both the gap 12 and the further gap 14 are filled with a fluid having an increased thermal conductivity κ compared with air.

[0033] In order to detect a pressure acting on the...

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Abstract

The invention discloses a measurement sensor, which comprises a matrix (3), a measurement diaphragm (5) arranged on the matrix (3) and a measurement device.A clearance between the measurement diaphragm (5) and the matrix (3) is filled with a fluid which presents an increased heat conductivity (kappa) compared to air.

Description

technical field [0001] The invention relates to a measuring sensor according to the preamble of claim 1 . Background technique [0002] Such measuring sensors are known from the prior art, for example as pressure measuring sensors for the capacitive detection of an external pressure acting on the measuring sensor. Such a capacitive pressure measuring sensor has a base body and a measuring diaphragm arranged on the base body, planar electrodes being arranged on mutually facing surfaces of the measuring diaphragm and the base body in order to form a capacitance. When a pressure acts on the measuring diaphragm, the distance between the measuring diaphragm and the base body changes and thus the capacitance of the capacitor formed by the individual measuring electrodes changes, so that the applied pressure can be detected. [0003] It is problematic in measuring sensors constructed according to this principle that due to rapid temperature changes, so-called thermal shocks, for e...

Claims

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Application Information

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IPC IPC(8): G01L9/12
CPCG01L19/04G01L9/0072
Inventor H·格吕勒
Owner VEGA GRIESHABER GMBH & CO
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