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Slot waveguide micro-ring resonance type single-fiber three-dimensional machine

A waveguide micro-ring and micro-ring resonance technology, applied in the coupling of optical waveguides and other directions, can solve the problems of limited chip output, low integration, large size of tri-directional devices, etc., to achieve flexible use, improve integration, The effect of reducing the size

Inactive Publication Date: 2012-08-08
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to reduce the optical waveguide transmission loss, waveguide and fiber coupling loss, and processing technology requirements, PLC uses silicon-based SiO2 waveguide core and cladding with a small refractive index difference (0.75%), and the waveguide bending radius is generally several millimeters , the prepared silicon-based PLC three-way device has a large size, the output of chips on a single silicon substrate is limited, and the integration level is not high

Method used

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  • Slot waveguide micro-ring resonance type single-fiber three-dimensional machine
  • Slot waveguide micro-ring resonance type single-fiber three-dimensional machine
  • Slot waveguide micro-ring resonance type single-fiber three-dimensional machine

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Embodiment 1

[0052] Embodiment 1, hybrid integration method: when the substrate 100 is silicon-on-insulator, the laser D3 , the first monitor detector D1 and the second monitor detector D2 are hybrid-integrated on the substrate 100 .

[0053] control figure 1 and figure 2 , the present invention adopts silicon-on-insulator (SOI) as the substrate 100, dry-etching on the substrate 100 to manufacture slot waveguide double micro-ring two-way filter F, the first input waveguide A1, the second input waveguide A2, the second input waveguide An output waveguide B1 and a second output waveguide B2, wherein the thickness of the silicon on the SOI layer is 320nm, the etching depth is 320nm, and the thickness of each involved waveguide is 320nm.

[0054] One main channel waveguide S0, the first waveguide double microring R1, the second waveguide double microring R2 included in the slot waveguide double microring two-way filter F, the first downloading waveguide S1 and the second downloading waveguid...

Embodiment 2

[0066] Embodiment 2, monolithic integration method:

[0067] Among them, the substrate 100 selects the III-V-OI formed by bonding the InP / InGaAsP substrate and the surface of the oxidized silicon wafer under high temperature annealing at 500°C as the substrate, the laser D3 uses an InP laser, the first monitoring detector D1 and the second The monitoring detectors D2 are all InGaAsP detectors, which are directly fabricated on the substrate 100 .

[0068] control figure 1 and figure 2 , the present invention uses a III-V-OI formed by bonding an InP / InGaAsP substrate and an oxidized silicon wafer surface at a high temperature as the substrate 100 . Dry etching on the substrate 100 to fabricate a slot waveguide double microring two-way filter F, the first input waveguide A1, the second input waveguide A2, the first output waveguide B1, the second output waveguide B2, where III-V- The thickness of the InGaAsP waveguide on the OI upper layer is 320nm, the etching depth is 320nm...

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Abstract

The invention relates to a slot waveguide micro-ring resonance type single-fiber three-dimensional machine. The slot waveguide micro-ring resonance type single-fiber three-dimensional machine comprises a substrate, a slot waveguide double micro-ring two-way filter, a first input waveguide, a second input waveguide, a first output waveguide, a second output waveguide, a first monitoring detector, a second monitoring detector and a laser, wherein the slot waveguide double micro-ring two-way filter is arranged on the substrate and comprises a main channel waveguide, a first waveguide double micro-ring, a second waveguide double micro-ring, a first download waveguide and a second download waveguide; the main channel waveguide, the first waveguide double micro-ring, the second waveguide doublemicro-ring, the first download waveguide and the second download waveguide are formed by slot waveguide structures; the first input waveguide, the second input waveguide, the first output waveguide and the second output waveguide are arranged on the substrate; the first monitoring detector is integrated on the substrate, and the receiving window of the first monitoring detector is connected with the tail end of the first output waveguide; the second monitoring detector is integrated on the substrate, and the receiving window of the second monitoring detector is connected with the tail end of the second output waveguide; and the laser is integrated on the substrate, and the output end of the laser is connected with one end of the second input waveguide.

Description

technical field [0001] The invention relates to a fiber-to-the-home user-end optical transceiver, in particular to a slot waveguide micro-ring resonant single-fiber tridirectional device. Background technique [0002] Fiber-to-the-home (FTTH) is currently internationally recognized as the most ideal solution for "last mile" high-speed, broadband-to-the-home. It is a hot research and development project with the most development potential and market prospects in the field of optical communications at home and abroad. [0003] Japan, South Korea, the United States and Europe are promoting this broadband access technology on a large scale, and my country has also begun to deploy the scheme of optical input and copper output, in which the single-fiber triaxial device at the user end (using the three-wavelength distribution scheme of 1310nm, 1490nm and 1550nm Among them, 1490nm is used for voice, data and IP video signal download; 1550nm is used for analog video signal download; 1...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/28
Inventor 宋世娇安俊明王玥吴远大胡雄伟
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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