Method and apparatus for producing a dislocation-free crystalline sheet

A flat, wide technology, applied in the field of self-melt formation of dislocation-free plates, can solve problems such as lattice dislocation

Active Publication Date: 2011-06-29
VARIAN SEMICON EQUIP ASSOC INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But some sources have indicated that such horizontally fabricated plates may still have dislocations in the lattice

Method used

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  • Method and apparatus for producing a dislocation-free crystalline sheet
  • Method and apparatus for producing a dislocation-free crystalline sheet
  • Method and apparatus for producing a dislocation-free crystalline sheet

Examples

Experimental program
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Embodiment Construction

[0026] Embodiments of the devices and methods herein are described in connection with solar cells. However, such embodiments may also be used in the manufacture of, for example, integrated circuits, flat panels, or other substrates known to those skilled in the art. Furthermore, although the melt is described herein as silicon, the melt may contain germanium, silicon and germanium, or other materials known to those skilled in the art. Accordingly, the invention is not limited to the specific examples described below.

[0027] figure 1 is a cross-sectional side view of one embodiment of a device for separating a plate from a melt. The device 21 for forming a panel has a container 16 and panels 15 and 20 . Container 16 and panels 15 and 20 may be, for example, tungsten, boron nitride, aluminum nitride, molybdenum, graphite, silicon carbide, or quartz. Vessel 16 is configured to contain melt 10 . Melt 10 may be silicon. In an embodiment, the melt 10 can be replenished via t...

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PUM

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Abstract

A dislocation-free sheet may be formed from a melt. A sheet of material with a first width is formed on a melt of the material using a cooling plate. This sheet has dislocations. The sheet is transported with respect to the cooling plate and the dislocations migrate to an edge of the sheet. The first width of the sheet is increased to a second width by the cooling plate. The sheet does not have dislocations at the second width. The cooling plate may have a shape with two different widths in one instance. The cooling plate may have segments that operate at different temperatures to increase the width of the sheet in another instance. The sheet may be pulled or flowed with respect to the cooling plate.

Description

technical field [0001] This invention relates to forming sheets from a melt, and more particularly to forming dislocation-free sheets from a melt. Background technique [0002] For example, silicon wafers or panels may be used in the integrated circuit or solar cell industries. As the demand for renewable energy increases, the demand for solar cells continues to increase. As these demands increase, one goal of the solar cell industry is to reduce the cost / power ratio. There are two types of solar cells: silicon and thin film. Most solar cells are made from silicon wafers, such as single crystal silicon wafers. Currently, the major cost of crystalline silicon solar cells is the wafer on which the solar cells are fabricated. The efficiency of a solar cell, or the amount of power generated under standard lighting, is limited in part by the quality of the wafer. Any reduction in the cost of manufacturing wafers without sacrificing quality will reduce the cost / power ratio an...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/304H01L31/042
CPCC30B28/06C30B11/003C30B29/06C30B29/60C30B11/001Y02E10/50H01L31/04H01L31/18
Inventor 彼德·L·凯勒曼法兰克·辛克莱菲德梨克·卡尔森尼可拉斯·P·T·贝特曼罗伯特·J·米歇尔
Owner VARIAN SEMICON EQUIP ASSOC INC
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