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Film thermistor sensor

A thin-film thermistor and thermistor technology, which is used in instruments, measuring heat, scientific instruments, etc., can solve the problems of difficult positioning, difficult positioning, and offset of lead frames, and achieve improved thermal responsiveness and reliability. Effect

Inactive Publication Date: 2011-09-21
MITSUBISHI MATERIALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] That is, in the above-mentioned conventional technology, if the lead part connected to the thermistor chip is strongly stretched, there is a force directly applied to the joint part of the lead part, and from the joint part of the lead part and the electrode, the joint of the electrode and the substrate worry about stripping
In addition, there is a problem that it is difficult to position the lead part correctly when connecting the lead part to the thermistor sheet, resulting in misalignment
In particular, there is a disadvantage that positioning is difficult due to the flat shape of the lead frame

Method used

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Embodiment Construction

[0029] Below, refer to Figure 1 to Figure 4 A first embodiment of the thin film thermistor sensor according to the present invention will be described. In addition, in each drawing used for the following description, in order to make each member or structure into a recognizable size, the scale of each member is changed suitably.

[0030] Such as figure 1 and figure 2 As shown, the thin film thermistor sensor 1 of this embodiment includes: an insulating substrate 2 of an alumina substrate; a thermistor film 3 forming a pattern on the insulating substrate 2; A pattern is formed on the upper surface of the thermistor film 3 ; and a pair of lead frames 5 connected to a pair of electrodes 4 .

[0031] The thermistor thin film 3 is a composite metal oxide film made of, for example, Mn-Co based composite metal oxide (for example, Mn 3 o 4 -Co 3 o 4 composite metal oxide) or a composite metal oxide containing at least one element of Ni, Fe, Cu in the Mn-Co composite metal oxi...

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Abstract

The invention discloses a film thermistor sensor, which has high tensile strength and can increase the reliability. The film thermistor sensor comprises an insulating substrate (2), a thermistor film (3) which forms patterns on the upper surface of the insulating substrate (2), one pair of electrodes (4) which form patterns from the upper surface of the insulating substrate (2) via the upper surface of the thermistor film (3), and one pair of wire leading frames (5) connected to one pair of electrodes (4), wherein each wire leading frame (5) consists of following parts: a front end jointing part (5a) jointed with the electrodes (4), a wire leading end part (5b) connected with the outer part, and a bent part (5c) formed between the front end jointing part (5a) and the wire leading end part (5b) and forming a bent shape.

Description

technical field [0001] The present invention relates to a thin film thermistor sensor used in sensors such as temperature sensors and flow sensors. Background technique [0002] For example, as temperature sensors and flow sensors for information equipment, communication equipment, medical equipment, housing equipment, automotive transmission equipment, etc., there are thermistor sheets made of sintered oxide semiconductors with a large negative temperature coefficient. A thin film thermistor sensor using this thermistor sheet has a structure in which terminal electrodes are formed, and a lead frame is attached to the electrode surface by soldering a conductive adhesive, welding, or the like. [0003] For example, Patent Document 1 proposes a temperature sensor using a lead frame composed of a plurality of lead parts formed of a metal plate, and electrically bonding a thin-film thermistor chip to the front end of the lead part. The narrow width forms the front end portion a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K1/00
Inventor 稻场均长友宪昭
Owner MITSUBISHI MATERIALS CORP
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