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X-y adjustable optical mount

A technology for assembly parts and optical components, applied in the field of parts assembly parts, can solve the problems of complexity, difficulty in additional motion, and increasing the risk of unfavorable additional motion.

Active Publication Date: 2013-08-07
CORNING INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The adverse effects of friction and changes in surface dimensions at the mechanical interface can cause some additional movement during adjustments to be unpredictable
Many of the traditional solutions proposed for X-Y plane adjustments are quite complex and include a large number of parts, increasing the risk of undesired additional movements when making adjustments

Method used

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  • X-y adjustable optical mount
  • X-y adjustable optical mount
  • X-y adjustable optical mount

Examples

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Embodiment Construction

[0027] Figures are shown and described herein to illustrate key principles of operation and manufacture of lens fixtures and actuation mechanisms according to various embodiments, and are not intended to be drawn to actual size or scale. Some exaggeration may be necessary to emphasize basic structural relationships or principles of operation.

[0028] In the context of this disclosure, references to "top" and "bottom" are relative and do not imply any necessary orientation of surfaces, but are simply used to refer to and distinguish opposing surfaces of a component or block of material.

[0029] refer to figure 1 , shows the internal components in the frame 12, namely the lens holder 10, while referring to the XYZ axes commonly used for microlensing instruments and other lens assemblies. The Z axis corresponds to the optical axis O. Various embodiments of optical component assemblies use figure 1 The overall configuration is shown, and an instrument is provided which allo...

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Abstract

An optical element mount has an inner member suspended within an outer member by a plurality of flexures. A first and a second translational adjustment apparatus are disposed to translate the inner member within a translation plane that is orthogonal to an optical axis, wherein each translational adjustment apparatus has an actuator movable within the outer member along a linear travel path that is parallel to the translation plane and a shaft extending between the outer and inner members, the shaft coupled to the actuator with a first ball-and-socket joint and coupled to the inner member with a second ball-and-socket joint. The linear travel path of the actuator for the first translational adjustment apparatus is substantially orthogonal to the linear travel path of the actuator for the second translational adjustment apparatus.

Description

[0001] Cross References to Related Applications [0002] This application claims priority to U.S. Patent Application 12 / 261644, filed October 30, 2008 by Blanding et al., which references U.S. Patent Application 12 / 072631, filed February 27, 2007 And titled "Monolithic Optical Mount". technical field [0003] The present invention relates generally to component assemblies, and in particular to assemblies for optical elements which allow adjustable translation in a plane normal to the optical axis. Background technique [0004] Photolithographic or microlithographic equipment is widely used in the fabrication of microelectronic semiconductor devices and other tiny devices. In photolithography, optical systems direct light energy to record patterns with high resolution and precise alignment on a photosensitive layer formed on a silicon wafer or other substrate. Continuous miniaturization improvements place more and more challenging demands on the performance and precision o...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/66H01L21/027
CPCG02B7/023G02B7/1822G02B7/026G02B7/1825B33Y80/00
Inventor D·L·布兰丁J·W·弗兰克维奇K·E·罕福德K·J·马吉尔斯基
Owner CORNING INC