AFM (Atomic Force Microscopy)-based processing method of nanometer channel

A processed and substrate technology, applied in the direction of nanotechnology, nanotechnology, nanostructure manufacturing, etc., to achieve the effect of low cost and easy operation
CN102211754BInactive Publication Date: 2013-09-18SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
Publication Date
2013-09-18
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an AFM (Atomic Force Microscopy)-based processing method of a nanometer channel. The nanometer channel with a specific depth and width is processed on a silicon dioxide substrate by controlling the elongation distance, the motion speed and the path of an AFM probe. The processing method of the nanometer channel, disclosed by the invention, can be applied to manufacture of a micro-fluidic chip; and the fluid characteristic in the nanometer channel and the characteristic analysis of biological single molecules are achieved by using the nanometer channel.
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Description

technical field

[0001] The invention relates to the field of nano-processing, in particular to an AFM-based nano-channel processing method, more specifically to a nano-channel processing method based on AFM scribing operations. Background technique

[0002] In recent years, the research and application of microfluidic chip technology in the fields of disease diagnosis, drug screening, and environmental detection has become increasingly widespread. etc. played an important role. With the development of technology, biomedical research and applications have begun to be carried out at the molecular, DNA, and protein levels. Microfluidic technology has been difficult to meet the needs of smaller-scale, smaller-dose, and higher-sensitivity detection and analysis of samples at the molecular level. Therefore, the smaller-scale chip technology-"nanofluidic control" has become a new focus of attention.

[0003] Nanoflow channels refer to tiny channels whose size is at the atomic or ...

Claims

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