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AFM (Atomic Force Microscopy)-based processing method of nanometer channel

A processed and substrate technology, applied in the direction of nanotechnology, nanotechnology, nanostructure manufacturing, etc., to achieve the effect of low cost and easy operation

Inactive Publication Date: 2013-09-18
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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AI Technical Summary

Problems solved by technology

[0006] Currently, nanoscale channels have not been processed using AFM probe manipulation techniques

Method used

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  • AFM (Atomic Force Microscopy)-based processing method of nanometer channel
  • AFM (Atomic Force Microscopy)-based processing method of nanometer channel
  • AFM (Atomic Force Microscopy)-based processing method of nanometer channel

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Experimental program
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Effect test

Embodiment

[0034] 1) Calibration of the sensitivity (PSD sensitivity) of the photoelectric position detection sensor and determination of the elastic modulus of the processed material (silicon dioxide):

[0035] Do force curves on silica substrates, such as figure 2 As shown, the abscissa is the vertical elongation of PZT, and the ordinate is the vertical deflection of PSD. From this curve, use the nanoscope software of American Veeco Company to calibrate the PSD sensitivity, s=56.13nm / V; use the Herz model: F is the elastic recovery force of the cantilever beam, k=40N / m, R=25nm, s×v is 4.39nm, δ is 6nm, and then according to E. tip Assumed to be infinite, ν substrate is 0.12, calculate E * =1.79GPa, the modulus of elasticity E of the processed material substrate 1.77Gpa;

[0036] 2) Determination of the distance from the probe to the substrate: gradually increase the elongation of the PZT in the vertical direction, each time a fixed increase of 5nm and record the number of incre...

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Abstract

The invention discloses an AFM (Atomic Force Microscopy)-based processing method of a nanometer channel. The nanometer channel with a specific depth and width is processed on a silicon dioxide substrate by controlling the elongation distance, the motion speed and the path of an AFM probe. The processing method of the nanometer channel, disclosed by the invention, can be applied to manufacture of a micro-fluidic chip; and the fluid characteristic in the nanometer channel and the characteristic analysis of biological single molecules are achieved by using the nanometer channel.

Description

technical field [0001] The invention relates to the field of nano-processing, in particular to an AFM-based nano-channel processing method, more specifically to a nano-channel processing method based on AFM scribing operations. Background technique [0002] In recent years, the research and application of microfluidic chip technology in the fields of disease diagnosis, drug screening, and environmental detection has become increasingly widespread. etc. played an important role. With the development of technology, biomedical research and applications have begun to be carried out at the molecular, DNA, and protein levels. Microfluidic technology has been difficult to meet the needs of smaller-scale, smaller-dose, and higher-sensitivity detection and analysis of samples at the molecular level. Therefore, the smaller-scale chip technology-"nanofluidic control" has become a new focus of attention. [0003] Nanoflow channels refer to tiny channels whose size is at the atomic or ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B82B3/00
Inventor 焦念东王志迁董再励
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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