Micro sound pressure sensor with bionic cricket cilia structure and manufacturing method thereof

A sound pressure sensor and micro-imitation technology, applied in instruments, measuring ultrasonic/sonic/infrasonic waves, measuring devices, etc., can solve the problems of low rigidity and low sensitivity of ciliary structure

Inactive Publication Date: 2011-11-23
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the shortcomings of low rigidity and low sensitivity of the cilia structure in the existing sound pressure sensor imitating the cilium structure of the cricket

Method used

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  • Micro sound pressure sensor with bionic cricket cilia structure and manufacturing method thereof
  • Micro sound pressure sensor with bionic cricket cilia structure and manufacturing method thereof
  • Micro sound pressure sensor with bionic cricket cilia structure and manufacturing method thereof

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Experimental program
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Example Embodiment

[0020] Specific implementation method

[0021] Refer to figure 1 The miniature cricket-like cilia structure sound pressure sensor in this embodiment includes a cricket-like cilia structure 1, a sensitive diaphragm 2, a supporting beam 3, a fixing structure 4, two detection electrodes 5, and a glass substrate 6; a cricket-like cilia structure 1 Located above the sensitive diaphragm 2 and connected to it as a whole, the cricket cilia structure 1 has a diameter of 500nm and a length of 10μm; the sensitive diaphragm 2 is connected to the annular fixed structure 4 through two supporting beams 3, and the sensitive diaphragm There is a 20μm gap 9 between 2 and the ring-shaped fixed structure 4; the ring-shaped fixed structure 4 is anodically bonded to the glass substrate 6 sputtered with two detection electrodes 5, so that a certain gap is passed between the sensitive diaphragm 2 and the two detection electrodes 5 A flat capacitor structure is formed to detect the vibration displacement...

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Abstract

The invention discloses a micro sound pressure sensor with a bionic cricket cilia structure and a manufacturing method thereof, belonging to the field of microelectromechanical systems (MEMS). The cricket cilia structure 1 of the sensor is positioned above a sensitive membrane 2 connected to an annular fixed structure 4 through a supporting beam 3; and the sensitive membrane 2 and two detection electrodes 5 on a glass substrate 6 form a flat type capacitor structure. When a foreign sound excites, the bionic cricket cilia structure 1 bends and deforms to drive the sensitive membrane 2 to move up and down, so that the capacitance between the sensitive membrane 2 and the two detection electrodes 5 changes, so as to detect the size of the sound pressure generated under the exciting of the foreign sound. The cilia structure 1 of the sensor disclosed by the invention has the advantages of high strength and large depth-to-width ratio and overcomes the defects of insufficient cilia stiffness and weak sensitivity of an acoustic sensor caused by SU-8 photoresist in the conventional method. The sensor can be used in the field of monitoring of moving targets in the sea, at the low altitude and on the ground.

Description

[0001] Field [0002] The invention belongs to the field of micro-electromechanical systems (MEMS), in particular to a sound pressure sensor with a miniature cricket-like cilia structure. Background technique [0003] Acoustic detection and positioning technology has important applications in the monitoring fields of ocean, low-altitude and ground moving targets. The sound pressure sensor is the key device for underwater acoustic signal reception in the passive acoustic detection device. The sound pressure sensor manufactured by traditional machining is large in size, high in operating frequency and low in sensitivity. In order to improve the detection ability of the target, it is necessary to reduce the operating frequency of the sound pressure sensor, expand the working bandwidth, improve the receiving sensitivity and reduce the volume and weight. The development of MEMS technology provides an important technology for the improvement of the sensitivity and miniaturization of...

Claims

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Application Information

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IPC IPC(8): G01H11/06
Inventor 马志波姜澄宇苑伟政刘振亚
Owner NORTHWESTERN POLYTECHNICAL UNIV
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