The invention discloses a
polypyrrole microelectrode with three-dimensional structure which belongs to the technical field of the micro-electro-mechanical preparation and is used in the miniature
supercapacitor, and a preparation method thereof. The preparation method of the
microelectrode comprises the following steps: adopting the MEMS technology to coat a SU-8
epoxy group negative chemically amplified
resist on the surface of a
copper substrate, performing spin-
coating, pre-baking, lithographic process treatment,
exposure, post-baking, development, rinsing and
heat setting to form a columnar structure which is prepared from SU-8
photoresist and is in an array arrangement, on the surface of the
copper substrate, and covering a functional film composed of
polypyrrole and conductive material on the surfaces of the
copper substrate and the microcolumn array
microelectrode. The invention solves the problems that the common
polypyrrole electrode with a two-dimensional structure can not store a large quantity of charges, have high
internal resistance and the like, thus improving the
energy storage characteristic and large current
discharge performance of the miniature
supercapacitor. The miniature
supercapacitor of the invention has wide application prospect in the fields of sensor network node power supply, micro-
robot driving power and
fuze power.