Miniature electrochemical sensor based on direct forming mesoporous carbon technology and manufacturing method

A mesoporous carbon and sensor technology, applied in the direction of electrochemical variables of materials, can solve problems such as application limitations, achieve complete functional structure, achieve performance, and achieve the effect of batch design and production

Inactive Publication Date: 2015-04-08
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In most cases, mesoporous carbon materials are in powder form after molding, and need to be formed with binders such as Nafion, which limits the application of mesoporous carbon materials in the working electrode materials of micro-electrochemical sensors.

Method used

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  • Miniature electrochemical sensor based on direct forming mesoporous carbon technology and manufacturing method
  • Miniature electrochemical sensor based on direct forming mesoporous carbon technology and manufacturing method
  • Miniature electrochemical sensor based on direct forming mesoporous carbon technology and manufacturing method

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Embodiment Construction

[0022] The preferred embodiments will be described in detail below in conjunction with the accompanying drawings.

[0023] A miniaturized electrochemical sensor based on direct-molded mesoporous carbon technology, such as Figure 1a and Figure 1b As shown, it includes: a device substrate 1, an insulating layer 2, a counter electrode 3 of platinum, a reference electrode 4 of solid silver / silver chloride, and a working electrode 5 of mesoporous carbon; wherein, the device substrate 1 is rectangular, and its The middle is covered with a rectangular working electrode 5 of mesoporous carbon and an electrode lead extending from a certain side of the working electrode 5 of mesoporous carbon; on the device substrate 1, except for the working electrode 5 and the lead of mesoporous carbon, All cover the insulating layer 2, and keep a gap between the insulating layer 2 and the working electrode 5 of the mesoporous carbon and the electrode lead; Small and large U-shaped platinum counter...

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Abstract

The invention belongs to the field of micro-sensors and micro-machining and particularly relates to a miniature electrochemical sensor based on a direct forming mesoporous carbon technology and a manufacturing method. The manufacturing method comprises the steps of using a silicon dioxide layer with 500 nm plasma enhanced chemical vapor deposition thickness as an insulation layer on a silicon wafer and obtaining a working electrode region through photo-etching and etching; obtaining graphs of a counter electrode and a reference electrode substrate region through photo-etching, evaporating 80 nm platinum and then stripping a photoresist; spin-coating an SU-8 photoresist and silicon oxide mixture on a silicon substrate template in the working electrode region, obtaining the working electrode region through photo-etching imaging and using hydrofluoric acid to remove template material silicon dioxide so as to obtain working electrode mesoporous carbon after 900 DEG C high-temperature carbonization; coating silver/silver chloride slurry on reference electrode substrate platinum to obtain solid silver/silver chloride reference electrode.

Description

technical field [0001] The invention belongs to the field of microsensors and micromachining, and in particular relates to a micro-electrochemical sensor based on direct forming mesoporous carbon technology and a manufacturing method. Background technique [0002] As a kind of sensor, electrochemical sensor characterizes the electrochemical properties of substances by measuring the changes of electrical signals such as potential and current in electrochemical reactions. The electrochemical sensor is mainly composed of two parts: a sensitive element and a conversion element. The electrochemical sensor first interacts with the substance to be measured through the sensitive element to produce a change in chemical quantity, and then converts the change in chemical quantity into a relevant electrical quantity through the conversion element. Signals, and finally through the processing of these electrical signals to obtain the relevant parameters of the substance to be tested. The...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/26
Inventor 王晓红滕非李四维申采为
Owner TSINGHUA UNIV
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