Microfluidic chip bonding method using SU-8 photoresist and PDMS as substrates

Abstract

The invention provides a microfluidic chip bonding method using an SU-8 photoresist and PDMS as substrates. The microfluidic chip bonding method comprises the following steps: firstly providing an SU-8 substrate and a PDMS substrate, cleaning the SU-8 substrate and the PDMS substrate by using isopropyl alcohol and deionized water, and then performing oxygen plasma treatment on the bonding surface of the PDMS substrate; performing silanization modification treatment on the bonding surfaces of the SU-8 substrate and the PDMS substrate by using an aqueous solution of APTES; and finally, enabling the bonding surfaces of the SU-8 substrate and the PDMS substrate to get close and carrying put press heating to bond the SU-8 substrate and the PDMS substrate to form a complete microfluidic chip. The microfluidic chip bonding method has the following beneficial effects that: 1) the bonding surface of the PDMS substrate can be modified by using an ordinary low-power plasma machine or a corona discharge instrument and other low-cost equipment; 2) the operation process is simple, the controllability, stability and repeatability of the process are high, the bonding strength and the yield are high, and the leakage does not easily occur; 3) the bonding of the SU-8 substrate and the PDMS substrate is helpful for realizing the precision multifunctional microfluidic chip with and complicated structure.

Description

technical field [0001] The invention provides a microfluidic chip bonding method using SU-8 photoresist and PDMS as substrates. It belongs to the field of microfluidic chips. technical background [0002] Microfluidics is a new research and application field interdisciplinary in biology, chemistry, medicine, physics, electronics, materials, machinery and so on. Microfluidic chip, also known as Lab-on-a-chip (Lab-on-a-chip), is a chip that integrates the basic operation units of sample preparation, reaction, separation, and detection in the process of biological, chemical, and medical analysis into a micro-nano scale. superior. The microfluidic chip forms a network with microchannels and microstructures, runs through the entire system with controllable fluids, and replaces various functions of conventional biological, chemical, and medical analysis laboratories to realize the miniaturization, portability, and multifunction of analytical equipment change. Microfluidic chip...

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Problems solved by technology

[0005] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a microfluidic chip bonding method using SU-8 photoresist and PDMS as the substrate, which is used to solve the problem of SU-8 substrate in the prior art. Difficult bonding of chips and PDMS substrates, high yield, expensive equipment and poor controllability, poor bonding effect, and easy leakage

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