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Method for preparing PDMS chip including both square and arc-shaped channel

An arc-shaped channel and square technology is applied in the field of preparation of microfluidic chips, which can solve the problems of complex process steps, stagnant synthetic materials, and low success rate, and achieve the effect of simple and fast process and controllable arc.

Active Publication Date: 2013-03-20
DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, most of the PDMS chips reversed by the SU-8 male mold have right-angled square channels, which are not suitable for some chip application systems.
For example, in a chip integrated with a pump valve structure, if the channel of the liquid channel layer is a right-angled square, when the PDMS membrane is deformed, the channel cannot be completely closed, and part of the liquid flow will still pass through; for the continuous synthesis of microsphere particles and microfibers For materials, rectangular channels are not very suitable, because the curved surface structure of microsphere particles and microfibers is quite different from the geometric configuration of rectangular channels, which will easily cause synthetic materials to stagnate in the channels and block them
In most efforts to fabricate arc-shaped channels, positive photoresist "Reflow" technology is used, but the process steps are complex and the success rate is low

Method used

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  • Method for preparing PDMS chip including both square and arc-shaped channel
  • Method for preparing PDMS chip including both square and arc-shaped channel
  • Method for preparing PDMS chip including both square and arc-shaped channel

Examples

Experimental program
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Effect test

Embodiment 1

[0026] as per figure 1 The steps shown further illustrate the implementation steps and substantive features of the method:

[0027] (1) A cross-linked SU-8 positive mold containing microchannel patterns was prepared by standard photolithography, and the microprotrusions contained were rectangular squares;

[0028] (2) Preparation of female PDMS: Clamp the cross-linked SU-8 male mold with a certain thickness of liquid PDMS. After the PDMS is cured, the female PDMS with the positive mold pattern reversed is obtained after the PDMS is opened, and the female PDMS is attached. On the glass sheet and silanized to facilitate subsequent demoulding;

[0029] (3) Preparation of uncrosslinked SU-8 positive mold: 150 micron thick solid uncrosslinked SU-8 photoresist removes air bubbles in advance, and clamps it with the PDMS female mold attached to the glass plate and puts it in a vacuum In the oven, after the inside of the oven is evacuated, the temperature is raised to 100°C and maint...

Embodiment 2

[0034] as per figure 1 In the steps shown, the liquid circuit layer in the chip integrated with the microvalve structure is prepared.

[0035] (1) A cross-linked SU-8 positive mold containing microchannel patterns was prepared by standard photolithography, and the microprotrusions contained were rectangular squares;

[0036] (2) Preparation of female PDMS: Clamp the cross-linked SU-8 male mold with a certain thickness of liquid PDMS. After the PDMS is cured, the female PDMS with the positive mold pattern reversed is obtained after the PDMS is opened, and the female PDMS is attached. On the glass sheet and silanized to facilitate subsequent demoulding;

[0037] (3) Preparation of uncrosslinked SU-8 positive mold: 150 micron thick solid uncrosslinked SU-8 photoresist removes air bubbles in advance, and clamps it with the PDMS female mold attached to the glass plate and puts it in a vacuum In the oven, after the inside of the oven is evacuated, the temperature is raised to 100°...

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Abstract

A method for preparing a PDMS chip including both square and arc-shaped channels comprises the following steps: clamping an SU-8 male mold of a cross-linked state prepared by standard photolithography with liquid PDMS to obtain a PDMS female mold with an inverted male mold pattern after the PDMS is cured; clamping the female mold PDMS with the solid uncross-linked SU-8 photoresist, heating the photoresist by a vacuum oven to make the photoresist be in a fluid state to fill the PDMS channels to obtain the uncrosslinked SU-8 male mold; selectively exposing the uncrosslinked SU-8 male mold to make the SU-8 male mold partially crosslink to form square protrusion portions; heating the male mold for some time to make the uncrosslinked portions be arc-shaped; performing a fully exposed crosslinking reaction, post-baking, solidifying the mold to get the stereotyped SU-8 square and arc-shaped male mold; and pouring with PDMS, curing, demolding to get the PDMS chip including both square and arc-shaped channels. The chip produced by the present invention is applied to preparation of a micro-fluidic chip liquid channel layer integrated with pneumatic micro-valves. The SU-8 male mold prepared by the invention is not easy to peel off from substrates. The radian of the PDMS chip arc-shaped channel is controllable. The simple and stable method is provided for the preparation of complex chips.

Description

technical field [0001] The invention belongs to the field of preparation methods of microfluidic chips, and in particular relates to a preparation method of PDMS chips containing both square and arc-shaped channels. Background technique [0002] Molding is currently the main method for making polymer chips. It is mainly a method of obtaining a mold through photoresist and solidifying a liquid polymer on the mold to obtain a chip with a microstructure. The mold material commonly used in the laboratory is SU-8 negative or positive glue, and the polymer is mainly polydimethylsiloxane (PDMS). Among them, SU-8 is a commonly used epoxy-based negative photoresist in MEMS technology, which has excellent mechanical, optical properties and chemical corrosion resistance, especially, based on its thermoplasticity when it is not crosslinked (the substance is heated when heated) It can flow and deform when it is cooled, and it can maintain a certain shape after cooling) and the character...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B29C39/02B29C33/38B01L3/00
Inventor 秦建华马静云姜雷张旭
Owner DALIAN INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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