The present invention discloses a
silicon waveguide spot size converter based on a multilayer
polymer structure and a preparation method thereof. The
silicon waveguide spot size converter based on themultilayer
polymer structure and the preparation method thereof are applied to
coupling of
silicon nanowire optical waveguides and common single-mode fibers. The structure is made by employing an integrated photoelectron process method, on a silicon substrate on an insulator layer, a taper-type silicon
waveguide is made, a
lithography technology is employed to continuously
nest three
layers of combined taper-type optical waveguides with materials of SU-8
photoresist on the insulator layer, and a
silicon dioxide upper cladding is deposited to achieve making of a spot size converter. The taper-type portions of the three
layers of combined taper-type optical waveguides with materials of SU-8
photoresist are employed to reduce the sizes of spot sizes entering the single-mode fibers in a horizontal direction and a vertical direction, perform
cascade with a reverse taper-type silicon waveguide and finally allow a
light field to couple into the silicon
nanowire optical waveguides. The directend face connection between the silicon
nanowire optical waveguides and the common single-mode fibers can be achieved, the matching with the single-mode
fiber spot size is improved, the
optical coupling efficiency is improved, and it is convenient to perform large-scale
optical path integration.