Small optical resolution photoacoustic microscope based on micro-electromechanical scanning galvanometer
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- UNIV OF ELECTRONICS SCI & TECH OF CHINA
- Publication Date
- 2018-04-20
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to the technical field of automatic control and imaging, in particular to a small photoacoustic microscope with optical resolution based on a microelectromechanical (MEMS) scanning vibrating mirror. Background technique
[0002] Optical resolution photoacoustic microscopy is a non-destructive medical imaging technology with high resolution and high contrast emerging in the past decade, which is widely used in various medical research. Different from traditional optical microscopes, optical-resolution photoacoustic microscopy needs to acquire images by point-by-point scanning, so a high-precision scanning mechanism is crucial for optical-resolution photoacoustic microscopy. At present, when applying optical resolution photoacoustic microscope to image the target object at home and abroad, the application of high-performance stepping motor or scanning galvanometer is the most common method to achieve high-precision scanning. Howeve...