Polypyrrole microelectrode with three-dimensional structure and preparation method thereof

A technology of three-dimensional structure and manufacturing method, which is applied in circuits, capacitors, electrical components, etc., to achieve the effects of improving storage capacity, improving high-current discharge characteristics, and improving energy storage characteristics

Inactive Publication Date: 2011-01-19
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Increasing the area of ​​micro-electrodes can effectively improve the energy storage characteristics of micro-supercapacitors,

Method used

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  • Polypyrrole microelectrode with three-dimensional structure and preparation method thereof
  • Polypyrrole microelectrode with three-dimensional structure and preparation method thereof
  • Polypyrrole microelectrode with three-dimensional structure and preparation method thereof

Examples

Experimental program
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Embodiment

[0026] Select the SU-8 100 specification model (product of Micro Chem Corp., USA) in the SU8 epoxy-based negative chemical amplification glue to carry out the glue-spinning process on the copper metal substrate to prepare the SU-8 glue film layer with uniform thickness. Put the SU-8 glue in an ultrasonic (frequency 33KHz) constant temperature bath, keep the temperature at 25°C, and vibrate ultrasonically for 30 minutes under the condition of a lower power of 50W to reduce the viscosity of the SU-8 glue and remove most of the gas in the glue.

[0027] Fix the copper metal substrate on the platform of the gluing machine, drop an appropriate amount of the above-mentioned SU-8 glue on the substrate, and uniformly accelerate the substrate speed from static to a certain low speed, the speed is 500 rpm, and maintain it for 5 seconds; Then evenly accelerate to a higher speed, the speed is 2000 rpm, maintain for 15 seconds, and then evenly decelerate to a standstill. The finished subst...

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Abstract

The invention discloses a polypyrrole microelectrode with three-dimensional structure which belongs to the technical field of the micro-electro-mechanical preparation and is used in the miniature supercapacitor, and a preparation method thereof. The preparation method of the microelectrode comprises the following steps: adopting the MEMS technology to coat a SU-8 epoxy group negative chemically amplified resist on the surface of a copper substrate, performing spin-coating, pre-baking, lithographic process treatment, exposure, post-baking, development, rinsing and heat setting to form a columnar structure which is prepared from SU-8 photoresist and is in an array arrangement, on the surface of the copper substrate, and covering a functional film composed of polypyrrole and conductive material on the surfaces of the copper substrate and the microcolumn array microelectrode. The invention solves the problems that the common polypyrrole electrode with a two-dimensional structure can not store a large quantity of charges, have high internal resistance and the like, thus improving the energy storage characteristic and large current discharge performance of the miniature supercapacitor. The miniature supercapacitor of the invention has wide application prospect in the fields of sensor network node power supply, micro-robot driving power and fuze power.

Description

technical field [0001] The invention belongs to the technical field of microelectronic machinery manufacturing, and in particular relates to a three-dimensional polypyrrole microelectrode applied to micro supercapacitors and a manufacturing method thereof. Background technique [0002] Miniaturization, miniaturization, and integration of electronic products are the general trend of technological development in the world today. Micro Electro Mechanical Systems (MEMS for short) has the characteristics of mobility, self-control, and integration, and is one of the most important technological innovations in recent years. When a subsystem can be integrated on a chip, the power supply must also complete the revolution of miniaturization and miniaturization. MEMS micro energy system refers to the integration of one or more power supply devices into a micro system with a characteristic size of micron level and a centimeter level based on MEMS technology, which can realize long-term...

Claims

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Application Information

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IPC IPC(8): H01G9/048
Inventor 王晓峰尤政
Owner TSINGHUA UNIV
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