Three-dimensional asymmetric miniature resonant cavity polymer single-mode laser
A micro-resonator, polymer technology, applied in the structure/shape of optical resonators, micro-lithography exposure equipment, instruments, etc., can solve problems such as unfavorable coupling, collapse and deformation of micro-resonators, etc.
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[0024] The present invention will be described in detail below in conjunction with the accompanying drawings and specific implementation examples.
[0025] Concrete implementation steps of the present invention are as follows:
[0026] First, the dye rhodamine B (0.02g) and the negative photoresist SU-8 (1.43g) were added to a certain volume (5.5ml) of cyclopentanone, and the mass ratio of the dye to the photoresist was configured as 1:71.4 mixed solution, cyclopentanone is used as a diluting solvent to make the rhodamine B dye fully and uniformly distributed in the SU8 photoresist. Spin-coat the mixed solution onto a 532nm narrow-band filter substrate, and place the substrate on an electric heating stage with a set temperature of 95 degrees Celsius for 2 hours to fully dissolve the dilute solvent cyclopentanone. evaporated.
[0027] A two-layer microresonator structure stacked directly on a commercially available high-reflectivity substrate was designed using VB software. ...
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