Method for manufacturing multi-layer metal mobile microstructure on metal base
A multi-layer metal and metal substrate technology, applied in the electrolytic process, electroforming and other directions, can solve the problems of difficulty in making movable microstructures, easy separation, fragile substrates, etc., to achieve strong impact resistance, high microstructure strength, Good verticality of side walls
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[0033] The specific implementation manners of the present invention will be described in detail below in combination with the above technical solutions and accompanying drawings.
[0034] For example: to make a multi-layer metal movable microstructure on a high-purity nickel plate with a nickel content of 99.99% after fine grinding and polishing. The size of the nickel plate is 63×63×3㎜. The specific steps for making this structure are as follows:
[0035] (1) Substrate pretreatment: The substrate pretreatment is divided into two parts: mechanical processing pretreatment and surface cleaning; the substrate material is high-purity nickel plate; the surface roughness Ra value of the nickel plate substrate after machining is 0.03-0.04 μm; the surface cleaning adopts After wiping with acetone cotton ball, ultrasonically clean in acetone and ethanol for 15 minutes respectively;
[0036] (2) Make the alignment mark on the back: perform SU-8 photoresist photolithography on the back o...
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