Method for preparing micro-nano-channels based on liquid-gas equilibrium polymer nano-channels self-building mechanism

A technology of nano-channels and polymers, which is applied in the direction of nano-technology, opto-mechanical equipment, and photolithography on patterned surfaces. easy-to-achieve effects

Inactive Publication Date: 2012-08-01
HEFEI UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention aims to provide a method for preparing a micro-nano fluidic system based on the self-construction mechanism of polymer nanochannels based on liquid-gas equilibrium. The technical problem to be solved is to provide a simple preparation method to avoid high-pressure, high-temperature extreme It is easy to cause distortion and deformation of micro-nano channels or destroy micro-nano structures, improve the success rate of preparation, and make the size of micro-nano channels controllable

Method used

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  • Method for preparing micro-nano-channels based on liquid-gas equilibrium polymer nano-channels self-building mechanism

Examples

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Embodiment 1

[0027] In this example, the micro-nanofluidic system is prepared by self-construction of polymer nanochannels based on liquid-gas equilibrium, and the operation is as follows:

[0028] 1. Take the glass sheet as the substrate, wash it with water and acetone, put it in an oven, and bake it at 130°C for 20 minutes to remove water vapor and residual acetone; then perform oxygen plasma treatment to increase the surface energy and the adhesion of the photoresist Force, the vacuum degree of oxygen plasma treatment on the substrate is 25Pa, the power is 60W, and the bombardment time is 90 seconds. A layer of SU-82002 photoresist with a thickness of 2 μm was spin-coated on the pretreated substrate, and baked on a hot stage at 90° C. for 20 minutes to remove the solvent in the adhesive layer.

[0029] 2. Put the glass grating template in concentrated H 2 SO 4 Soak in a mixed solution of hydrogen peroxide and hydrogen peroxide (volume ratio 2:1) for two hours, then clean it with deion...

Embodiment 2

[0036] The operation process of this example is the same as that of Example 1. In step 5, SU-82025 is replaced by SU-82002, and other parameters remain unchanged, and a nanochannel with a diameter of about 60 nm can be obtained.

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Abstract

The invention discloses a method for preparing micro-nano-channels based on a liquid-gas equilibrium polymer nano-channels self-building mechanism. The method comprises the following steps of: first, preparing a nano grating structure of SU-8 photoresist by using a grating template and a nano-imprint lithography technology; then, spin-coating a layer of release agent on the grating structure of the SU-8 photoresist; and finally, coating a layer of SU-8 photoresist on the grating structure of the SU-8 photoresist coated with the release agent by a slit type extrusion gluing way, wherein the micro-nano-channels are formed by a coated SU-8 photoresist layer which is balanced with the air pressure trapped in a grating under the action of surface tension, and the preparation of a micro-nano flow control system is finished. According to the method, high pressure and high temperature are not needed, so that deformation and damage of a polymer grating structure are avoided; processing successrate is improved; and by the method, the sizes of the micro-nano-channels can be controlled by adjusting the surface tension of a polymer.

Description

1. Technical field [0001] The invention relates to a preparation method of a micro-nano channel, specifically a method for preparing a micro-nano channel based on a liquid-gas equilibrium polymer nano-channel self-construction mechanism, and belongs to the technical field of micro-nano fluid system production. 2. Background technology [0002] In recent years, the basic and technical application research related to nanofluidic systems has become an attractive frontier field. It is generally defined as the cross-section of the channel for fluid flow in the size range of hundreds to several nanometers. Various physical and chemical properties of fluids are very different at micro-nano and macro-scales. In recent years, relevant research has made breakthroughs in some important theories of traditional theories, and used its properties in the stretching and manipulation of DNA molecules. , drug release technology, battery technology, lasers and many other fields have achieved ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00G03F7/20B81C1/00B82Y40/00
CPCB81C1/00071
Inventor 王旭迪李鑫涂吕星郑正龙刘玉东
Owner HEFEI UNIV OF TECH
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