Method for preparing micro-flowing injection type chemical luminous chip

A chemiluminescence and injection technology, applied in chemiluminescence/bioluminescence, chemical analysis by microanalysis, and analysis by chemical reaction of materials, etc., can solve the problem of poor controllability of microstructure size and low production efficiency , poor surface quality and other problems, to achieve the effect of high production efficiency, low cost and simple equipment

Inactive Publication Date: 2007-03-14
XI AN JIAOTONG UNIV
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Problems solved by technology

However, its main problems are poor controllability of microstructure size, poor

Method used

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  • Method for preparing micro-flowing injection type chemical luminous chip

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Embodiment Construction

[0010] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0011] 1) Surface cleaning of silicon wafers: The cleaning of silicon wafers is mainly to remove oil stains and various adsorbed impurity particles on the surface of silicon wafers to obtain a clean surface. Wipe the surface of the silicon wafer repeatedly with a cotton swab dipped in acetone and absolute ethanol successively. Then place the silicon chip in an acetone solution, ultrasonically clean it for 4-8 minutes, take it out, put it directly into absolute ethanol, and then clean it ultrasonically for 5-10 minutes. After cleaning, the surface of the silicon wafer was repeatedly rinsed with deionized water, and finally dried with high-purity nitrogen.

[0012] 2) Surface hydrophobic modification treatment: put the cleaned silicon chip into a mixed solution of sulfuric acid and hydrogen peroxide with a mass concentration of 98% for 10 to 20 minutes, and th...

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Abstract

The manufacture method for micro-flow injector chemical luminous chip comprises: with silicon piece, PDMS and SU-8 photoresist as material, manufacturing micro-channel and interfaces by standard micro-manufacturing technique; manufacturing mold structure by standard photo-etching technique, using molding cast and solidification technology to prepare the micro-chip structure; finally, irreversible packing the channel. This invention is simple and reliable, and is high sensitive with a little sample.

Description

technical field [0001] The invention relates to a micro detection and analysis device and a preparation method thereof, in particular to a micro detection and analysis for trace and ultra-trace detection, used in various fields such as biological reaction, chemical analysis, food inspection, health quarantine, environmental monitoring, etc. Flow injection chemiluminescence chip and its preparation method. Background technique [0002] Chemiluminescence (CE) is when certain molecules in the chemical reaction system, such as reactants, intermediates or fluorescent substances, absorb the energy released by the reaction without excitation from light, electricity, magnetism, sound or heat. Transition from the ground state to the excited state, and then return to the ground state from the excited state, and at the same time, energy can be released in the form of light radiation, resulting in chemiluminescence. Based on this chemiluminescence analysis, emission photon measurement ...

Claims

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Application Information

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IPC IPC(8): G01N21/76G01N31/20G01N33/48
Inventor 王朝晖王小章王腾张群明
Owner XI AN JIAOTONG UNIV
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