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A measuring method of capacitive humidity sensor

A humidity sensor and measurement method technology, applied in the direction of material capacitance, etc., can solve the problems of poor storage time stability, limited detection and resolution ability, poor anti-stray capacitance ability, etc., to improve resolution, overcome time instability, eliminate The effect of the effect of stray capacitance

Inactive Publication Date: 2011-12-07
SHANGHAI MARITIME UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantages of these two methods are: poor resistance to stray capacitance, poor time stability of stored electricity, low sensitivity, limited detection resolution, and low measurement accuracy

Method used

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  • A measuring method of capacitive humidity sensor
  • A measuring method of capacitive humidity sensor
  • A measuring method of capacitive humidity sensor

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Embodiment Construction

[0009] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further elaborated below in conjunction with illustrations and specific embodiments.

[0010] The invention proposes a measurement method for a capacitive humidity sensor, the steps of which are: use a sinusoidal AC excitation source to store electricity on the measured capacitor, detect the stored electric current of the measured capacitor and the stored electric voltage at both ends of the measured capacitor through a phase-locked amplifier circuit, and pass through The capacitance of the measured capacitor is obtained by the ratio operation, and then the measured humidity is obtained according to the corresponding relationship between capacitance and humidity in the capacitive humidity sensor manual.

[0011] like figure 1 As shown, C in the figure X is the measured humidity sensitive capacitance; C as 、C bs...

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Abstract

The invention proposes a measurement method for a capacitive humidity sensor, the steps of which are: use a sinusoidal AC excitation source to store electricity on the measured capacitor, detect the stored electric current of the measured capacitor and the stored electric voltage at both ends of the measured capacitor through a phase-locked amplifier circuit, and pass through The capacitance of the measured capacitor is obtained by the ratio operation, and then the measured humidity is obtained according to the corresponding relationship between capacitance and humidity in the capacitive humidity sensor manual.

Description

technical field [0001] The invention relates to a measuring method of a capacitive humidity sensor. Background technique [0002] Because the humidity sensitive capacitor has the advantages of high sensitivity, good product interchangeability, fast response speed, small hysteresis of humidity, wide range of humidity detection, easy manufacture, and easy miniaturization, etc., capacitive humidity sensors have been widely used in humidity measurement. However, the current main measurement methods for measuring humidity with humidity-sensitive capacitive sensors are: pulse counting method and pulse width modulation method. The basic principles of these two methods are: the humidity-sensitive capacitance sensor and the fixed resistor form an RC circuit, and the capacitance value of the humidity-sensitive capacitance sensor is obtained by measuring the storage time of the RC circuit, and then according to the capacitance value and The corresponding relationship of humidity is ob...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/22
Inventor 李建亮李建明
Owner SHANGHAI MARITIME UNIVERSITY