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Gyroscope and manufacturing method thereof

A technology of gyroscope and support ring, applied in the field of semiconductor manufacturing, can solve the problems of inability to integrate the gyroscope, and achieve the effect of increasing inertia, improving performance and enhancing stability

Active Publication Date: 2014-01-08
ZHEJIANG JUEXIN MICROELECTRONICS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to the limitation of the semiconductor manufacturing process, it is impossible to integrate the gyroscope with a large mass of inertial mass into the integrated circuit

Method used

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  • Gyroscope and manufacturing method thereof
  • Gyroscope and manufacturing method thereof
  • Gyroscope and manufacturing method thereof

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Experimental program
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Embodiment Construction

[0051] It can be seen from the background technology that all gyroscopes have a mass ring, and the greater the mass of the mass ring, the greater the inertia, which can make the gyroscope better in stability and anti-environmental vibration and noise. However, due to the limitation of the semiconductor manufacturing process , it is impossible to form a gyroscope with a mass ring with a large mass in an integrated circuit.

[0052] The inventor of the present invention obtains a kind of gyroscope through a large amount of experiments, comprises: substrate, has the bottom drive electrode and the bottom measurement electrode that is positioned at the bottom drive electrode periphery in the substrate; There is a closed cavity in the cavity; the cavity includes: a central axis located on the substrate; a support ring placed on the substrate and capable of rotating around the central axis; a mass located on the periphery of the support ring and having the same central axis as the sup...

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Abstract

A gyroscope and a manufacturing method are provided. The gyroscope comprises: a substrate with a bottom driving electrode and a bottom measuring electrode, and a dielectric layer with a sealed cavity comprising: a central axis on the substrate; a support ring on the substrate rotatable around the central axis; a mass ring surrounding and having common central axis with the support ring; cantilevers connected with the support ring and the mass ring and suspend the mass ring in the cavity; elastic components among the support ring, the mass ring and two adjacent cantilevers; a top driving electrode overlaying the support ring, the mass ring, the cantilevers and the elastic components; a conductive plug connected with top driving electrode and bottom driving electrode on the elastic components. The mass ring comprises an insulation layer and a weight layer. Stability and performance of the gyroscope may be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a gyroscope and a manufacturing method thereof. Background technique [0002] Gyroscope is an instrument that can accurately determine the orientation of moving objects. It is an inertial navigation instrument widely used in modern aviation, navigation, aerospace and defense industries. The development of gyroscopes is of great strategic significance to the development of a country's industry, national defense and other high technologies. The traditional gyroscope mainly refers to the mechanical inertial gyroscope. Due to the complex structure of the mechanical inertial gyroscope, the requirements for the process structure are very high, so its accuracy is restricted by many aspects. [0003] An existing miniature vibrating dual-axis sensing gyroscope, such as figure 1 As shown, a base 54 is included, a central axis 55 is arranged at the center of the base 5...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/567G01C19/5712
CPCG01C19/04G01C19/5712Y10T74/1296Y10T74/1282
Inventor 毛剑宏韩凤芹唐德明
Owner ZHEJIANG JUEXIN MICROELECTRONICS CO LTD
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