Novel adjustable substrate delivery roll device

Abstract

The invention discloses a novel adjustable substrate delivery roll device. Space position can be adjusted, so rigidity and reliability are guaranteed. The device is provided with a stepped shaft; a bearing pedestal is arranged at the periphery of the stepped shaft and has an eccentric structure; the stepped shaft is fixed on a vacuum cavity wall through the bearing pedestal; a central line of a mounting hole of the bearing pedestal is deviated by 0.5 to 1 mm; a transmission roll is sleeved on an optical axis section at one end in a stepped shaft vacuum chamber and is in clamping connection with the stepped shaft through a transmission key; two sides of the transmission roll are provided with one group of nuts respectively; the end part of the optical axis section of the stepped shaft is provided with fine threads; a synchronous belt pulley is sleeved at one end out of the stepped shaft vacuum chamber; and the synchronous belt pulley is in clamping connection with the stepped shaft through the transmission key. The device can improve coating quality of the substrate and can reduce requirements of procedures of welding, processing, assembling and the like, so that manufacturing costof equipment is reduced, the device can be adjusted axially and radially, and adjusting accuracy is guaranteed.

Description

technical field [0001] The invention relates to a transmission device for supporting and conveying each substrate frame in a magnetron sputtering coating device, in particular to a novel adjustable substrate conveying roller device. Background technique [0002] In the large-area magnetron sputtering coating equipment, there are several substrate holders supporting the substrate. Rigidity prevents unnecessary losses caused by "loosening" during operation. Therefore, when designing the support and conveying device of the substrate holder, the conveying roller of the device is designed to be a fixed and non-adjustable structure, that is, the conveying roller axial and The radial position is fixed. In order to meet the assembly accuracy (here mainly refers to the straightness of the center line of each conveying roller after the machine is assembled), it depends on the processing accuracy of the device itself and the processing accuracy of the installation hole position of the...

AI Technical Summary

Problems solved by technology

[0002] In the large-area magnetron sputtering coating equipment, there are several substrate holders supporting the substrate. Rigidity prevents unnecessary losses caused by "loosening" during operation. Therefore, when designing the support and conveying device of the substrate holder, the conveying roller of the device is designed to be a fixed and non-adjustable structure, that is, the conveying roller axial and The radial position is fixed. In order to meet the assembly accuracy (here mainly refers to the straightness of the center line of each conveying roller after the machine is assembled), it depends on the processing accuracy of the device itself and the processing accuracy of the installation hole position of the conveying device on the machine. Guarantee; however, it is not enough to guarantee the assembly accuracy of the conveying device only by the processing accuracy of the installation hole position of the device and the processing accuracy of the device itself

[0003] Judging from the operation of the existing equipment, the noise when conveying the substrate is too loud, and sometimes there is the sound of metal impact, and the overall precision of the machine is not high; from the perspective of affecting the overall manufacturing accuracy of the machine, especially the straightness, In addition to the machining accuracy of the equipment and the machining accuracy of the installation hole positions of the equipment, the welding deformation of each chassis of the machine, the verticality of the connection surface of each chassis and the bottom plane, the contour of the installation holes of each equipment, the height difference of each base of the chassis and each These factors, such as the inclination error of the support plane of the base, will seriously affect the straightness of the line connecting the centers of the conveying rollers; in addition, the substrate holder must run smoothly and without noise throughout the entire length, at least the distance between each box must be well controlled. After the connection, the straightness of the center line of the conveying roller is within 0.1mm. This technical index is very necessary according to the requirements of the coating process, especially in the coating chamber, which requires the substrate to run as smoothly as possible during coating. Because of the straightness error of the conveying roller, the slight shaking of the substrate will directly lead to the decline of the coating quality

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