Multi-arc-ion vacuum coating machine
A vacuum coating machine and multi-arc ion technology, applied in ion implantation coating, vacuum evaporation coating, sputtering coating, etc., can solve problems affecting service life, rough coating surface, large friction, etc., to achieve durability Corrosion and lubricating properties are improved, the coating is dense and bright, and the effect of excellent performance
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[0038] This embodiment provides a multi-arc ion vacuum coating machine, such as Figure 1-12 As shown, it includes a chamber 1, a vacuum system 2 and a multi-arc target assembly 3. The chamber 1 is provided with a rotating frame assembly 4, and a worktable 41 is installed on the rotating frame assembly 4. The rotating frame assembly 4 is used to drive the workbench 4 rotates in the chamber 1, and the workbench 41 is used to install the workpiece; the vacuum system 2 is connected to the chamber 1 to vacuumize the chamber 1; the multi-arc target assembly 3 includes several cathode multi-arc target seats 31, Each cathode multi-arc target base 31 is provided with a permanent magnet 32. In this embodiment, the outer end of the cathode multi-arc target base 31 is bolted to a carbon steel fixture 33, and one end of the carbon steel fixture 33 is adsorbed with a permanent magnet. 32, and the permanent magnet 32 is fixed on the cathode multi-arc target seat 31; the inner end of each ...
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