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Multi-arc-ion vacuum coating machine

A vacuum coating machine and multi-arc ion technology, applied in ion implantation coating, vacuum evaporation coating, sputtering coating, etc., can solve problems affecting service life, rough coating surface, large friction, etc., to achieve durability Corrosion and lubricating properties are improved, the coating is dense and bright, and the effect of excellent performance

Pending Publication Date: 2018-03-16
BEIJING TECHNOL SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Compared with ordinary ion plating coating machines, the multi-arc ion coating deposition rate is fast and the efficiency is high, but there are more large particles in the coating, and the coating is poor in compactness, which affects the performance of tools and workpieces
Especially for some finishing tools and workpieces, the surface of the coating is rough and the friction is high, which directly affects its service life, so the traditional ion coating cannot meet the coating requirements of such products

Method used

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Embodiment 1

[0038] This embodiment provides a multi-arc ion vacuum coating machine, such as Figure 1-12 As shown, it includes a chamber 1, a vacuum system 2 and a multi-arc target assembly 3. The chamber 1 is provided with a rotating frame assembly 4, and a worktable 41 is installed on the rotating frame assembly 4. The rotating frame assembly 4 is used to drive the workbench 4 rotates in the chamber 1, and the workbench 41 is used to install the workpiece; the vacuum system 2 is connected to the chamber 1 to vacuumize the chamber 1; the multi-arc target assembly 3 includes several cathode multi-arc target seats 31, Each cathode multi-arc target base 31 is provided with a permanent magnet 32. In this embodiment, the outer end of the cathode multi-arc target base 31 is bolted to a carbon steel fixture 33, and one end of the carbon steel fixture 33 is adsorbed with a permanent magnet. 32, and the permanent magnet 32 ​​is fixed on the cathode multi-arc target seat 31; the inner end of each ...

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Abstract

The invention discloses a multi-arc-ion vacuum coating machine which comprises a cavity, a vacuum-pumping system and a multi-arc target assembly. A rotary frame assembly is arranged in the cavity, a worktable is installed on the rotary frame assembly, the rotary frame assembly is used for driving the worktable to rotate in the cavity, and the worktable is used for installing workpieces. The vacuum-pumping system is connected with the cavity. The multi-arc target assembly comprises a plurality of cathode multi-arc target seats, a permanent magnet is arranged on each cathode multi-arc target seat, the inner end of each cathode multi-arc target seat is in sealed connection with the cavity through a straight tube magnetic field superposition device, the inner ends of the cathode multi-arc target seats are connected with target material seats sleeved with the straight tube magnetic field superposition devices, the target material seats are used for installing target materials, the cathode multi-arc target seat is provided with an arc introducing device, the arc introducing pins of the arc introducing devices can be in contact with the target materials, and the straight tube magnetic field superposition devices can produce changing magnetic fields in the space where the target materials are located. The multi-arc-ion vacuum coating machine can effectively filter large particles in acoating and make the coating dense and polish and is excellent in performance.

Description

technical field [0001] The invention relates to the technical field of ion coating, in particular to a multi-arc ion vacuum coating machine. Background technique [0002] In the 21st century, machinery manufacturing technology is developing towards high efficiency, high precision, high reliability and specialization; in order to improve efficiency, processing accuracy, reliability and reduce costs, it is necessary to develop ultra-high cutting processing technology, and for ultra- The processing of hard materials and difficult-to-machine materials requires the development of high-performance tools and high-performance hard coatings; and many "green manufacturing technologies" that save energy, protect the environment, and reduce pollution are also inseparable from the development of high-performance tools. The ion coating machine can realize the coating treatment of the tool and the part mold, so that it has excellent performance, significantly improves the surface hardness,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/32
CPCC23C14/325
Inventor 田琳夏虎施戈
Owner BEIJING TECHNOL SCI
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