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Capacitor type micro-machined gyroscope for amplifying movement speed of mass block

A technology of capacitive micro-machines and motion speed, which is applied in the direction of speed measurement by gyro effect, gyroscope/steering sensing equipment, speed/acceleration/shock measurement, etc. Sensitivity and other issues, to achieve the effect of increasing Coriolis force, facilitating detection and improving sensitivity

Inactive Publication Date: 2013-06-05
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in practical applications, the Coriolis force generated by the micromechanical gyroscope is extremely small, and the change in the resonant frequency of the resonator caused by it is also extremely small, so it is difficult to achieve high sensitivity

Method used

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  • Capacitor type micro-machined gyroscope for amplifying movement speed of mass block
  • Capacitor type micro-machined gyroscope for amplifying movement speed of mass block
  • Capacitor type micro-machined gyroscope for amplifying movement speed of mass block

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] The capacitive micromechanical gyroscope for amplifying the moving speed of the mass block in this embodiment includes the mass block 11; with the center of the mass block 11 as the origin, the direction parallel to one side of the mass block is the X direction, and the direction parallel to the other direction is the Y direction , the capacitive micro-mechanical gyro that amplifies the movement speed of the mass block proposed by the present invention is symmetrical about the Y axis in the X direction, and symmetrical about the X axis in the Y axis direction;

[0018] The mass block 11 is connected to the sensitive comb-tooth beam 12 through the folded beam II13 connected to its side in the X direction, and the sensitive comb-tooth beam 12 is connected to the anchor point through the folded beam I10 at both ends; fixed on the sensitive comb-tooth beam 12 The movable comb teeth and the static comb teeth fixed on the sensitive detection electrode 15 form a sensitive detec...

Embodiment 2

[0022] The capacitive micromechanical gyroscope for amplifying the moving speed of the mass block in this embodiment includes the mass block 11; with the center of the mass block 11 as the origin, the direction parallel to one side of the mass block is the X direction, and the direction parallel to the other direction is the Y direction , the capacitive micro-mechanical gyro that amplifies the movement speed of the mass block proposed by the present invention is symmetrical about the Y axis in the X direction, and symmetrical about the X axis in the Y axis direction;

[0023] The mass block 11 is connected to the sensitive comb-tooth beam 12 through the folded beam II 13 connected to its X-direction side, and the sensitive comb-tooth beam 12 is connected to the anchor point through the folded beam I10 at both ends; fixed on the sensitive comb-tooth beam 12 The moving comb teeth on the top and the static comb teeth fixed on the sensitive detection electrode 15 form a sensitive d...

Embodiment 3

[0027] The capacitive micromechanical gyroscope for amplifying the moving speed of the mass block in this embodiment includes the mass block 11; with the center of the mass block 11 as the origin, the direction parallel to one side of the mass block is the X direction, and the direction parallel to the other direction is the Y direction , the capacitive micro-mechanical gyro that amplifies the movement speed of the mass block proposed by the present invention is symmetrical about the Y axis in the X direction, and symmetrical about the X axis in the Y axis direction;

[0028] The mass block 11 is connected to the sensitive comb-tooth beam 12 through the folded beam II 13 connected to its side in the X direction, and the sensitive comb-tooth beam 12 is connected to the anchor point through the folded beam I 10 at both ends; fixed on the sensitive comb-tooth beam The moving comb teeth on 12 and the static comb teeth fixed on the sensitive detection electrode 15 form a sensitive d...

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PUM

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Abstract

The invention discloses a capacitor type micro-machined gyroscope for amplifying movement speed of a mass block, belonging to the technical field of a micro-electromechanical system, which is characterized in that on a Y-direction side, the mass block 11 of a gyroscope is connected with a lever 3 through a folding beam II 16, the connecting points of the folding beam II 16 and the lever 3 are called second driving transmission points, the lever 3 is connected onto an anchor point through two lever supporting point beams 2, the connecting points of the lever supporting point beams 2 and the lever 3 are called supporting points, simultaneously, the lever 3 is respectively connected with a driving comb tooth beam 6 through two driving transmission beams 1, the connecting points of the lever 3 and the driving transmission beams 1 are called first driving transmission points, and the distances d1 between the supporting points to the first driving transmission points are less than the distances d2 between the supporting points and the second driving transmission points. In the invention, the X-direction displacement is amplified by the principle of the lever, compared with the existing gyroscope, under the condition that the input angle is not change, the capacitance change quantity at the sensitive direction of the gyroscope, caused by the Coriolis force, is increased by d2 / d1 times, so the detection is facilitated, and the sensitivity is improved.

Description

[0001] Field: [0002] The invention relates to a capacitive micromechanical gyroscope for amplifying the moving speed of mass blocks, belonging to the technical field of microelectromechanical systems. Background technique: [0003] Due to its small size, low power consumption, and low cost, micromechanical gyroscopes have broad application prospects in military fields such as inertial navigation and attitude reference. The basic working principle of the vibrating micromechanical gyroscope is based on a physical phenomenon, that is, the moving object in the rotating coordinate system will be affected by the inertial force perpendicular to the direction of the velocity, that is, the Coriolis force F=2mv×ω. Among them, m is the mass of the mass block, v is the motion velocity of the mass block, ω is the rotational angular velocity of the mass block, and × represents the symbol of the outer product of the two vectors. The direction of the Coriolis force is perpendicular to the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5719G01C19/5733
Inventor 常洪龙李小卿焦文龙苑伟政丁继亮
Owner NORTHWESTERN POLYTECHNICAL UNIV