Flat panel detector for X rays

Abstract

The invention provides a flat panel detector for X rays and a manufacturing method. The flat panel detector for the X rays comprises a substrate, thin film transistors (TFT), photodiodes and capacitors, wherein the substrate comprises an array area consisting of a plurality of TFTs and a plurality of photodiodes; the bottom gates of the TFTs and the lower electrodes of the capacitors are manufactured above the substrate; the photodiodes are positioned above the capacitors; and the upper electrodes of the capacitors are the lower electrodes of the photodiodes. Correspondingly, the invention also provides the manufacturing method for the flat panel detector for the X rays. When the gates of the TFTs are manufactured, the lower electrodes of the capacitors below the photodiodes are manufactured synchronously, and any additional process is not required to manufacture the capacitor to realize the automatic exposure control function of the X rays and reduce manufacturing cost; and the capacitors are manufactured below the photodiodes, the image quality of the X rays may not be influenced.

Description

technical field [0001] The invention relates to the field of X-ray detectors, in particular to the field of exposure control of flat-panel X-ray detectors. Background technique [0002] In the process of medical detection, in order to minimize the radiation dose received by patients while ensuring the quality of X-ray imaging, it is very critical to control the start and end of X-ray exposure. The commonly used methods include: controlling the start and end of X-ray exposure manually by a radiologist or an electronic timer; controlling the termination of X-ray exposure by AEC (Automatic exposure control, automatic exposure control) equipment. [0003] AEC equipment is a device that controls the X-ray exposure time. Its purpose is to precisely control the X-ray exposure time under the premise of ensuring the quality of the X-ray image, and minimize the X-ray dose emitted to the patient. The signal generated by the AEC equipment is proportional to the X-ray flux received by t...

AI Technical Summary

Problems solved by technology

Although the integration of the AEC system and the flat-panel X-ray detector can be realized by adopting different processes, the complexity of the manufacturing process of the flat-panel X-ray detector will be increased to varying degrees, and the manufacturing cost of the flat-panel X-ray detector will also be increased.

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