System and method for controlling zone melting furnace for producing silicon single crystal by using abnormity polycrystalline material

Abstract

The invention relates to a system and method for controlling a zone melting furnace for producing silicon single crystal by using an abnormity polycrystalline material. The system comprises a zone melting furnace motion controller connected with a migration motor, at least three distance measurers and a PLC (Programmable Logic Controller). The three distance measurers are respectively connected with the PLC. The PLC is connected with the zone melting furnace motion controller. The PLC controller is used for transmitting migration vector data of an upper shaft of the zone melting furnace to the zone melting furnace motion controller in real time. The zone melting furnace motion controller is used for controlling the migration motor to drive an X shaft and an Y shaft of the upper shaft of the zone melting furnace to migrate so that the circle centre of any section of the whole abnormity polycrystalline material is centred in the process of reaching a solid-liquid interface. By using the improved control system and method, the problems of easy eccentricity of a melting zone, resulted from the abnormity polycrystalline material, even easiness for striking fire, resulted from the contact between the melting zone and a coil, and easy breakage of zone melting silicon single crystal, can be solved, therefore, the quality stability of the product is ensured.

Description

technical field [0001] The invention relates to a zone melting furnace control system, in particular to a zone melting furnace control system and a control method for producing silicon single crystals by using special-shaped polycrystalline material. Background technique [0002] In actual production, the polycrystalline rods used in the production of zone melting silicon single crystals are not all standard cylindrical shapes, but have a certain degree of curvature. Such polycrystalline materials are called special-shaped polycrystalline materials. It can even be said that most polycrystalline bars have some degree of curvature. In the production of zone-melted silicon single crystal, the bent polycrystalline material rod will easily lead to the eccentricity of the melting zone, which will easily cause ignition due to the contact between the melting zone and the coil, and also easily lead to the breaking of the zone-melting silicon single crystal. Contents of the inventio...

AI Technical Summary

Problems solved by technology

In the production of zone-melting silicon single crystal, the bent polycrystalline material rod is likely to cause the eccentricity of the melting zone, which in turn may easily cause ignition due to the contact between the melting zone and the coil, and also easily lead to the breakage of the zone-melting silicon single crystal

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