Overheat protecting device and method of motorized spindle and cutter

Abstract

The invention provides an overheat protecting device and an overheat protecting method of a motorized spindle and a cutter. The overheat protecting device comprises a temperature monitoring module, a coolant flow monitoring module and a control module, wherein the temperature monitoring module is used for monitoring the temperature of the motorized spindle and outputting a first signal; the coolant flow monitoring module is used for monitoring the flow of a coolant and outputting a second signal; the coolant is used for cooling the motorized spindle; and the control module is used for controlling the motorized spindle to stop operating or operating according to the preset mode when the first signal shows that the temperature of the motorized spindle is higher than a preset first threshold and / or the second signal shows that the flow of the coolant is lower than a preset second threshold. By using the technical scheme, the overheat protection for the motorized spindle is better realized, the work state of the motorized spindle is stabilized, the influence caused by overheat on work precision of a host machine is avoided, the work quality is improved and the motorized spindle is protected.

Description

technical field [0001] The invention relates to the field of integrated circuit packaging equipment manufacturing, in particular to an overheat protection device for an electric spindle, an overheat protection method and a cutting machine. Background technique [0002] The dicing machine is the key equipment for semiconductor post-packaging, and its function is to divide the wafer into individual circuit units. The working mechanism of the cutting machine is powerful grinding, and the electric spindle is the executive part of the powerful grinding. The electric spindle is to directly install the stator and rotor of the motor into the interior of the spindle assembly, sometimes called a direct drive spindle (Direct Drive Spindle), which is a built-in motor spindle. [0003] In order to ensure the quality of wafer cutting, the electric spindle is required to have high speed, high precision and high stability, and an aerostatic electric spindle is usually used. [0004] When ...

AI Technical Summary

Problems solved by technology

[0005] Embodiments of the present invention provide an electric spindle overheat protection device, an overheat protection method, and a cutting machine to solve the technical problem that the prior art does not fully consider the overheat protection of the electric spindle of the cutting machine

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