Free-curved-surface-type detecting system

A curved surface and free technology, which is applied in the field of free-form surface detection system, can solve the problems of free-form surface damage and low detection accuracy of profiler, and achieve the effect of quasi-real-time accuracy, high precision and broad application prospects

Inactive Publication Date: 2012-02-15
SUZHOU UNIV
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Problems solved by technology

[0004] Since the free-form surface detection system in the prior art adopts the method of spatially locating the points on the free-form surface with a profiler, contact measurement must be carried out on the surface to be detected, so it is easy to cause damage to the free-form surface
At the same time, the detection accuracy of the profiler is also very low

Method used

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Embodiment Construction

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] see figure 1 , is a structural diagram of the free-form surface detection system according to the embodiment of the present invention. Such as figure 1 As shown, the system includes:

[0025] Laser generator 1 , collimating mirror 2 , first computational holographic element 3 , second computational holographic element 4 , projection mirror 5 , illumination system 6 , spatial filter 9 , and CCD image sensor 11 .

[0026] Wherein, the laser generator 1...

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Abstract

The invention discloses a free-curved-surface-type detecting system, which comprises a laser generator, a collimating lens, a first computing holographic element, a second computing holographic element, a projecting lens, an illuminating system, a spatial filter and a CCD (Charge-Coupled Device) image sensor, wherein the first computing holographic element is used for carrying out first-time diffraction for parallel light; the second computing holographic element is used for diffracting first-level light which is diffracted by the first computing holographic element; the spatial filter is used for filtering interference stray light; and the CCD image sensor is used for obtaining an interference image. In the free-curved-surface-type detecting system disclosed by the invention, a free-curved-surface-type error is obtained by analyzing the interference image (concretely an interference fringe) on the basis of a Fizeau interference principle, so that the non-contact type detection for a free-curved-surface type can be carried out, and the detecting precision of the free-curved-surface type is improved.

Description

technical field [0001] The invention relates to the field of optical instrument detection, in particular to a free-form surface detection system. Background technique [0002] With the development of advanced manufacturing technology and precision instruments, more and more optical systems use free-form surfaces to achieve some special imaging effects. As the complexity of the free-form surface increases, the difficulty of detecting the free-form surface also increases. [0003] In the prior art, a profiler is usually used to detect the surface shape of a free-form surface. The principle of the profilometer to detect the surface shape of the free-form surface is mainly: use the contact method to measure the surface to be detected point by point. Specifically, for example, the probe touches a certain point on the surface to be tested, and the spatial coordinates of the contact point are measured until all points on the surface to be tested are measured. [0004] Since the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 郭培基洪小苗
Owner SUZHOU UNIV
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