Drive frequency tunable mems gyroscope

Abstract

A drive frequency tunable MEMS sensor in one embodiment includes a mass, a mass drive component configured to drive the mass within a plane, a plurality of non-linear springs supporting the mass a first tuner operably connected to the plurality of non-linear springs for modifying the stress condition of the plurality of non-linear springs in response to a trim voltage, and a trim circuit electrically coupled with the first tuner for providing the trim voltage.

Description

technical field [0001] The present invention relates to semiconductor devices, and in particular to devices including sensor elements. Background technique [0002] In the past, MEMS have proven to be effective solutions in many applications due to the sensitivity, spatial and temporal resolution, and lower power requirements exhibited by microelectromechanical systems (MEMS) devices. As a result, MEMS-based sensors such as accelerometers, gyroscopes, and pressure sensors have been developed for use in various applications. [0003] MEMS gyroscopes can be configured as rotating mass devices or as vibrating devices, both of which rely on the Coriolis effect to produce angular changes in the device that are measured by sensors. Linear oscillating devices have a number of advantages over devices that rely on a rotating mass. In linear devices, a spring-supported mass called a Coriolis mass is guided in linear oscillatory motion. As the MEMS device rotates, the Coriolis mass ...

AI Technical Summary

Problems solved by technology

Adding voltage on the detection side of the sensor increases the complexity of the adjustments required at the sensor output to allow detection of out-of-plane motion of the Coriolis mass

For example, applying pulsed U DF cause extra noise

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