Device for separating disc-shaped elements
A device and plate technology, which is applied in the field of equipment for separating plate components, can solve problems such as uncertainty in holding force, and achieve the effect of simplifying processing and avoiding falling.
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[0029] figure 1 Shown is a part of a relatively large apparatus, which is used in the process of processing eg wafers. The term "wafer" here means a substantially plate-shaped element. In this context, plate shape means that the extension in the first and second dimensions is much greater than in the third dimension.
[0030] The device 1 separates the plate-type elements from the stack 2 . Such as figure 1 Shown on the right and left side of the stack 2, the stack 2 comprises a plurality of individual plate-type elements oriented parallel to each other. The plate-type elements are oriented in such a way that the stacking axis extending in the conveying direction indicated by the arrow is arranged perpendicular to the individual plate-type elements. The stack 2 is arranged in a horizontal position in the liquid pool. In this context, the term "horizontal" refers to the position adopted during operation. As indicated by the water lines, the stack 2 is arranged integrally ...
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