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Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control

An adaptive fuzzy, micro-gyroscope technology, applied in the field of control systems, can solve problems that have not yet been applied

Inactive Publication Date: 2012-04-11
HOHAI UNIV CHANGZHOU
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] At present, adaptive fuzzy control has not been applied in the control system of micro gyroscope

Method used

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  • Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control
  • Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control
  • Control method of MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control

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Embodiment Construction

[0039] Specific embodiments of the present invention will be further described in detail below.

[0040] 1. MEMS micro gyroscope dynamic equation

[0041] MEMS micro-vibration gyroscopes generally consist of three components: mass blocks supported by elastic materials, electrostatic drive devices and sensing devices. The main function of the electrostatic drive circuit is to drive and maintain the constant amplitude of the vibration of the micro-vibration gyroscope; the sensing circuit is used to sense the position and speed of the mass. The micro gyroscope can be simplified as a damped vibration system composed of a mass block and a spring. figure 1 A simplified model of the microvibration gyroscope in Cartesian coordinates is shown. For MEMS micro gyroscopes, it can be considered that the mass block is limited to move only in the x-y plane, but not along the Z axis. In fact, due to the existence of manufacturing defects and machining errors, additional dynamic coupling of...

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Abstract

The invention discloses a control method of an MEMS (micro-electromechanical system) micro-gyroscope based on direct self-adaptive fuzzy control. A control system of the MEMS micro-gyroscope based on direct self-adaptive fuzzy control comprises a direct self-adaptive fuzzy controller, and is characterized in that: the direct self-adaptive fuzzy controller comprises a basic fuzzy controller which is built by a fuzzy logic system and is used for approximating an ideal controller of the MEMS micro-gyroscope, and a D (digital) controller which is used for ensuring that the state of a gyroscope system is bounded. In the control system of the MEMS micro-gyroscope based on direct self-adaptive fuzzy control, the direct self-adaptive fuzzy control method is applied to gyroscope control. The knowledge and the experience of experts can be combined with the fuzzy controller, and parameters in the fuzzy system are self-adaptively adjusted by a Lyapunov-based method, thereby the stability of the fuzzy control system is ensured. The fuzzy controller can be widely applied to the MEMS gyroscope control to improve the stability and the reliability of the system, and has great value in use in industry.

Description

technical field [0001] The invention relates to a control system of a MEMS gyroscope, in particular to the application of a direct adaptive fuzzy control method on the MEMS gyroscope. Background technique [0002] MEMS gyroscopes are the most commonly used sensors for measuring angular velocity in many applications, such as navigation, guidance, and control stability. A MEMS gyroscope is a device that uses the Coriolis force (i.e.: the earth's rotation deflection force) to transfer energy from one axis to another. The traditional mode of operation lacks the ability to drive the gyroscope from one mode to a known oscillation. Motion, while the detected Coriolis acceleration is coupled to the sensing mode of vibration, which is perpendicular to the driving mode, and the response of the vibration sensing mode provides information about the practical angular velocity. Due to the existence of errors in the manufacturing process and the influence of the ambient temperature, the d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B13/00G01C19/56
Inventor 费峻涛隽婉茹
Owner HOHAI UNIV CHANGZHOU
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