Micro electromagnetic vibration energy harvester based on patterned permanent magnet full integration

Abstract

The invention discloses a micro electromagnetic vibration energy harvester based on patterned permanent magnet full integration, and belongs to the technical field of micro electromechanical systems. The micro electromagnetic vibration energy harvester comprises an insulating substrate, a plane spiral induction coil, an insulating material coating layer, a vibration pickup structure, a patterned permanent magnet, support structures and lead electrodes, wherein the insulating substrate, the plane spiral induction coil, the insulating material coating layer, the vibration pickup structure and the patterned permanent magnet are sequentially fixed upwards from the bottom; the support structures are fixedly connected with the insulating substrate; and the vibration pickup structure is suspended above the insulating material coating layer. In external vibration, the permanent magnet fixed together with the vibration pickup structure changes a magnetic flux in the induction coil by inertial movement, thereby generating induction voltage. The permanent magnet is integrated and manufactured by utilizing a micro structure patterning method, and moreover, the patterned permanent magnet has a relatively thicker micro structure, so that the patterned permanent magnet has energy acquisition and conversion efficiency which is higher than that of an electroplated permanent magnet, and is compatible to an integrated circuit (IC) process and easy to machine in batches.

Description

technical field [0001] The invention relates to a device in the field of micro-electromechanical technology, in particular to a fully integrated miniature electromagnetic vibration energy harvester based on patterned permanent magnets. Background technique [0002] As microelectromechanical systems (MEMS) and wireless sensor networks continue to advance, how to power them has become a major obstacle to their development. Commonly used battery and power line power supply is inconvenient to operate and use, especially for wireless sensor network communication. Due to its long service life and wide distribution of nodes, it is difficult to reach the working position of sensors in some places. Replace the battery or use power line power supply. In many cases it is impractical. Vibration energy harvesters can convert vibration energy in the surrounding environment into electrical energy to power tiny components. However, the vibration energy harvester obtained by traditional me...

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Problems solved by technology

However, the entire device is still assembled by hand in the end, and the parameters are difficult to control. The overall manufacturing process is complicated and difficult to mass produce.

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