Piezoelectric ceramic driving power supply and driving method

Abstract

The invention discloses a piezoelectric ceramic driving power supply and a driving method. The piezoelectric ceramic driving power supply comprises a pulse width modulation (PWM) driving module, an output stage circuit and a feedback closed loop circuit, wherein the feedback closed loop circuit comprises a voltage feedback closed loop circuit and a current feedback closed loop circuit. The displacement of piezoelectric ceramics and the quantity of electric charges on the piezoelectric ceramics are in linear relation, namely the displacement of the piezoelectric ceramics and current flowing through the piezoelectric ceramics are in the linear relation; however, the displacement of the piezoelectric ceramics and voltage on the piezoelectric ceramics are in nonlinear relation. In the piezoelectric ceramic driving power supply and the driving method in the embodiment of the invention, the current feedback closed loop circuit is arranged, and the voltage feedback closed loop circuit and the current feedback closed loop circuit control a voltage signal output by the piezoelectric ceramic driving power supply according to a voltage signal and a current signal on the piezoelectric ceramics, thereby avoiding hysteresis and improving linear control accuracy.

Description

technical field [0001] The present application relates to the field of driving power technology, in particular to a piezoelectric ceramic driving power and a driving method. Background technique [0002] With the development of science and technology and the continuous expansion of research fields, the application requirements of nano-positioning systems are becoming more and more extensive. As a new type of material in the field of nano-level positioning, piezoelectric ceramics have small volume, high displacement resolution, high frequency response, and no noise. , no heat and other characteristics, it is an ideal micro-displacement element, the piezoelectric ceramic driving power supply is the driving part of the piezoelectric ceramic, and it is also the core part of the piezoelectric ceramic. [0003] Through the research on the prior art, the inventors found that the conventional pulse width modulation driving power supply is based on the voltage feedback linear control...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the above technical problems, the embodiment of the present application provides a piezoelectric ceramic driving power supply and a driving method to solve the problems of low linear control accuracy and hysteresis in the existing piezoelectric ceramic driving power supply. The technical solution is as follows:

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