Uniform temperature type efficient electric heating furnace

Abstract

The invention relates to a uniform temperature type efficient electric heating furnace, which comprises a support seat (1), a furnace inner tube (11), a furnace outer tube (11) and a tube body (28), wherein heat insulation materials (12) are filled between the furnace inner tube (10) and the furnace outer tube (11), the tube body (28) is fixedly arranged on the support seat (1) arranged at the bottom of the tube body, and the upper part of the tube body (28) is connected with a furnace cover (23). The uniform temperature type efficient electric heating furnace is characterized in that a resistance belt heating element (7) is arranged on the inner wall of the furnace inner tube (10), a bottom heating element (2) is arranged at the bottom of the tube body (28) and on the support seat (1), acolumn-shaped heating element (8) is arranged in the center of the tube body (28), a heated medium pipe (5) is spirally arranged around the column-shaped heating element (8) and is positioned in an inner cavity of the tube body (28) through a fixing element (4) and a support rod (3), the fixing rod (4) is connected with the lower end of a hanging rod (29) through a connecting element (14), the hanging rod (29) is fixedly arranged in the furnace cover (23), the inlet end (17) and the outlet end (21) of the heated medium pipe (5) respectively pass through the furnace cover (23), a protection gas inlet pipe (26) passes through the bottom (46) of the tube body to be communicated with the inner cavity of the tube body (28), and a protection gas outlet pipe passes through the furnace cover (23)to be communicated with the inner cavity of the tube body (28). The uniform temperature type efficient electric heating furnace has the advantages that the uniform temperature performance in the furnace is good, and the manufacture, the hanging and the maintenance of a furnace pipe are convenient.

Description

technical field [0001] The invention relates to an electric heating device, which is used in occasions where the gas needs to be heated evenly, especially an electric heating furnace used for heating reaction gas in the production process of solar silicon polysilicon, specifically a uniform temperature high-efficiency electric heating furnace. heating furnace. Background technique [0002] At present, solar technology has been widely used. As one of the key components of solar energy utilization, silicon rods must heat the mixture of H2, SiCl4 and H2 during the production process. Among them, the electric heater for cold hydrogenation of silicon tetrachloride must be used at high temperature, Working under high pressure, flammable and explosive gas environment such as hydrogen, and strong corrosive medium environment, the requirements for products are very high, and the uniformity of heating directly affects the growth of silicon rods. The single inner surface heating m...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to design a uniform temperature high-efficiency electric heating furnace for the proble

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