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Silicon microcapacitor type two-dimensional integrated acceleration sensor

An acceleration sensor and capacitive technology, applied in the field of MEMS sensors, can solve problems such as cross-interference, achieve the effects of suppressing cross-interference, saving chip area, and good manufacturability

Inactive Publication Date: 2012-05-02
CHONGQING UNIV OF TECH
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Problems solved by technology

[0004] The existing two-dimensional integrated micro-acceleration sensors, whether two independent acceleration sensors are fabricated on the same substrate, or a single sensitive mass element is used to detect acceleration in two directions, there is a serious problem of cross-interference

Method used

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  • Silicon microcapacitor type two-dimensional integrated acceleration sensor
  • Silicon microcapacitor type two-dimensional integrated acceleration sensor
  • Silicon microcapacitor type two-dimensional integrated acceleration sensor

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Embodiment Construction

[0024] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0025] figure 1 It is a schematic structural diagram of the cross-section of a silicon microcapacitive two-dimensional integrated acceleration sensor, as shown in the figure. The silicon microcapacitive two-dimensional integrated acceleration sensor includes a base 1, a fixed support 2, an inner inertial mass 3 with an "I"-shaped cross section, an outer inertial mass 4 with a hollow structure, a fixed tooth hub 5, and fixed comb teeth 6. Movable comb teeth 7, X "U"-shaped folded beam with main deformation in direction 8, Y The "U"-shaped folded beam 9 and the stopper 10 of the main deformation in the direction.

[0026] Among them, the cross section of the inner hole of the outer inertial mass 4 is "I" shaped, four vertically upward fixed supports 2 are arranged on the base 1, and the tops of the four fixed supports 2 are distribut...

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Abstract

The invention discloses a silicon microcapacitor type two-dimensional integrated acceleration sensor, which comprises a base, an internal inertia mass block, an external inertia mass block, a fixed tooth pivot, fixed comb teeth and movable comb teeth, wherein the internal inertia mass block is hung in an inner bore of the external inertia mass block by four folding beams; a capacitor CAy is formed by left-rear and right-rear fixed comb teeth and corresponding movable comb teeth; a capacitor CBy is formed by left-front and right-front fixed comb teeth and corresponding movable comb teeth; a capacitor CBx is formed by rear-left and front-left fixed comb teeth and corresponding movable comb teeth; and a capacitor CAx is formed by rear-right and front-right fixed comb teeth and corresponding movable comb teeth. An X-direction differential capacitor is formed by the capacitors CBx and CAx and is used for detecting the acceleration in an X direction; a Y-direction differential capacitor is formed by the capacitors CAy and CBy and is used for detecting the acceleration in a Y direction; and the accelerations in the X and the Y directions are respectively sensed by respective capacitor sensitive structures, thus cross interference can be effectively inhibited.

Description

technical field [0001] The invention belongs to the technical field of MEMS sensors, in particular to a silicon microcapacitive two-dimensional integrated acceleration sensor. [0002] Background technique [0003] At present, the technology of uniaxial miniature acceleration sensor is relatively mature. However, in some special applications, such as aircraft attitude control, missile guidance, battlefield robots, etc., it is often necessary to detect acceleration in two directions. If only the early combination method is used, that is, two uniaxial miniature acceleration sensors are assembled orthogonally to each other, not only the performance of the sensor is greatly affected by the assembly accuracy, but also there are problems such as low integration, large volume, and poor consistency. Therefore, the two-dimensional integrated micro-acceleration sensor has become a research hotspot. [0004] The existing two-dimensional integrated micro-acceleration sensors, whether...

Claims

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Application Information

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IPC IPC(8): G01P15/18G01P15/125
Inventor 刘妤
Owner CHONGQING UNIV OF TECH
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