Silicon micro-capacitive two-dimensional acceleration sensor

Abstract

The invention discloses a silicon micro-capacitive two-dimensional acceleration sensor which comprises a substrate, an internal inertial mass block, a left internal inertial mass block, a right internal inertial mass block, fixed tooth pivots, fixed comb teeth and movable comb teeth, wherein the internal mass block is arranged between the left internal mass block and the right internal mass blockthrough four folding beams in a suspended manner; the fixed comb teeth which are positioned at the left-rear side and the right-rear side of the fixed tooth pivots as well as the fixed comb teeth which are positioned at the left-front side and the right-front side of the fixed tooth pivots respectively form a capacitor CAy and a capacitor CBy together with corresponding movable comb teeth; the fixed comb teeth which are positioned at the rear-left side and the front-left side of the fixed tooth pivots as well as the fixed comb teeth which are positioned at the rear-right side and the front-right side of the fixed comb teeth respectively form a capacitor CBx and a capacitor CAx together with corresponding movable comb teeth. The capacitor CBx and the capacitor CAx form a differential capacitor in an X direction for detecting the acceleration in the X direction; the capacitor CAy and the capacitor CBy form a differential capacitor in a Y direction for detecting the acceleration in the Ydirection; and the acceleration in the X-direction and the acceleration in the Y direction are respectively perceived by sensitive structures of respective capacitors, so that the cross interference can be effectively inhibited.

Description

technical field [0001] The invention belongs to the technical field of MEMS sensors, in particular to a silicon microcapacitive two-dimensional acceleration sensor. Background technique [0002] At present, the technology of uniaxial miniature acceleration sensor is relatively mature. However, in some special applications, such as aircraft attitude control, missile guidance, battlefield robots, etc., it is often necessary to detect acceleration in two directions. If only the early combination method is used, that is, two uniaxial miniature acceleration sensors are assembled orthogonally to each other, not only the performance of the sensor is greatly affected by the assembly accuracy, but also there are problems such as low integration, large volume, and poor consistency. Therefore, the two-dimensional integrated micro-acceleration sensor has become a research hotspot. [0003] The existing two-dimensional integrated micro-acceleration sensors, whether two independent acce...

AI Technical Summary

Problems solved by technology

[0003] The existing two-dimensional integrated micro-acceleration sensors, whether two independent acceleration sensors are fabricated on the same substrate, or a single sensitive mass element is used to detect acceleration in two directions, there is a serious problem of cross-interference

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