Mask plate box capable of measuring size of mask plate protection film

Abstract

The invention relates to the manufacturing field of a semiconductor, in particular to a mask plate box capable of measuring size of a mask plate protection film. Through the mask plate box capable of measuring the size of the mask plate protection film, a scale is arranged in the mask plate box; under the condition of not contacting the mask plate box, the size of the mask plate protection film can be simply and quickly measured; the risk of falsely using mask plates can be reduced; the step of judging through other equipment and tools can be omitted; and the process cost is saved.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuits and its manufacture, in particular to a mask box capable of measuring the size of a mask mask protective film. Background technique [0002] Since different types of lithography machines are used for different processes in the semiconductor chip manufacturing industry, mask plate protective films of different sizes are required for use in corresponding different types of lithography machines; figure 1 It is a schematic structural diagram of the mask plate in the background technology of the present invention; figure 1 As shown, the narrow side 13 of the mask plate protection film 12 disposed on the quartz plate 11 will vary in size with different types of photolithography machines. If the mask mask protective film of the wrong size is used, it will cause damage to the mask mask or the equipment. Therefore, the mask manufacturer will check the type of protective film used when the ...

AI Technical Summary

Problems solved by technology

If you use the wrong size mask protective film, it will cause damage to the mask or the equipment. Therefore, the mask manufacturer will check the type of protective film used when the mask leaves the factory, but there will be a certain risk of missed inspection.

[0003] At present, most chip manufacturers only check the list of mask protection films when they purchase, and do not check the actual size of the protective film. It will be found that the size is wrong. In addition, because the size of different models only differs by a few millimeters, it cannot be found by visual inspection alone in the actual process, which will cause damage to the mask or equipment.

Although some manufacturers now use the photos taken by the mask defect inspection equipment to conduct indirect inspections, it will waste equipment time and labor, increase process costs, and take a long time

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