TFT (Thin Film Transistor) array substrate, manufacturing method and liquid crystal display device

An array substrate and substrate technology, applied in the field of manufacturing methods, liquid crystal display devices, and TFT array substrates, can solve the problems of affecting picture quality, not being able to completely guarantee shading, and increasing manufacturing costs, etc.

Active Publication Date: 2014-06-11
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In the above-mentioned light-shielding production process, the inventor found that in the prior art, one is to increase the mask patterning process, which increases the manufacturing cost and reduces the production efficiency; the other is that when the alignment accuracy is poor, the pixel electrode and The distance between the data lines will increase, and the existing method cannot completely guarantee the shading, which increases the possibility of light leakage and affects the picture quality

Method used

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  • TFT (Thin Film Transistor) array substrate, manufacturing method and liquid crystal display device
  • TFT (Thin Film Transistor) array substrate, manufacturing method and liquid crystal display device
  • TFT (Thin Film Transistor) array substrate, manufacturing method and liquid crystal display device

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Embodiment Construction

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0031] The TFT array substrate manufacturing method provided by the embodiment of the present invention, such as figure 1 As shown, the steps include:

[0032] S101 , forming a first conductive film on a glass substrate, and obtaining gate lines and gate electrodes through a patterning process.

[0033] Specifically, a metal thin film with a thickness of 1000 to 7000 Å can be prepared on a glass substrate by using a magnetron sputtering method. The metal mat...

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Abstract

The embodiment of the invention provides a TFT (Thin Film Transistor) array substrate, a manufacturing method and a liquid crystal display device, and relates to the manufacture field of thin film transistor liquid crystal displays. A mask plate composition process is unnecessary to be additionally provided for shading, and the shading can be effectively guaranteed. The method comprises the following steps of: forming data lines and grid lines which are crossed with each other transversely and longitudinally on a substrate, and forming pixel units through encircling the data lines and the grid lines, wherein each pixel unit comprises a TFT switch; forming a passivating layer on the substrate; depositing a pixel electrode layer on the passivating layer; coating photoresist on the pixel electrode layer and carrying out exposure and developing to form a photoresist complete reservation area corresponding a pixel electrode area and a photoresist complete removal area corresponding to other areas; etching to remove a pixel electrode layer of the photoresist complete removal area; processing the substrate to change the surface of the passivating layer of the photoresist complete removal area to be black; and stripping to remove the photoresist of the photoresist complete removal reservation area.

Description

technical field [0001] The invention relates to the field of manufacturing thin film transistor liquid crystal displays, in particular to a TFT array substrate, a manufacturing method and a liquid crystal display device. Background technique [0002] TFT-LCD (Thin Film Transistor-Liquid Crystal Display, Thin Film Transistor-Liquid Crystal Display) uses the change of the electric field intensity set on the liquid crystal layer to change the degree of rotation of liquid crystal molecules, thereby controlling the intensity of light transmission to display images. Generally speaking, a complete liquid crystal display panel must have a backlight module group, a polarizer, an upper substrate (usually a color filter substrate), a lower substrate (usually an array substrate), and a box filled with the two substrates. Layers of liquid crystal molecules. The array substrate is formed with data lines and gate lines that cross vertically and horizontally; the data lines and gate lines ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/84H01L21/768H01L21/027H01L21/20H01L27/12G02F1/1362
Inventor 谢振宇陈旭龙春平
Owner BOE TECH GRP CO LTD
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