Synchronous lifting component and synchronous lifting and horizontal moving mechanism

A technology of synchronous lifting and horizontal movement, applied in the direction of lifting devices, mechanical equipment, transmission devices, etc., can solve the problems of lack of stability, high cost, and unsuitable lifting of mask tables, etc., and achieve simple structure, low cost, and reduced occupation effect of space

Inactive Publication Date: 2012-06-06
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Because the lithography machine has relatively high requirements on the environment, the hoist using hydraulic or pneumatic methods is not suitable for lifting the mask table; the use of electrical systems including servo motors to lift the mask table is costly; and the electric hoist is used for lifting The mask table is not stable at all

Method used

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  • Synchronous lifting component and synchronous lifting and horizontal moving mechanism
  • Synchronous lifting component and synchronous lifting and horizontal moving mechanism
  • Synchronous lifting component and synchronous lifting and horizontal moving mechanism

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Embodiment Construction

[0022] The following will combine Figure 1 to Figure 6 The synchronous lifting component and the synchronous lifting and horizontal movement mechanism of the present invention are further described in detail.

[0023] A synchronous lifting component for a synchronous lifting and horizontal movement mechanism includes a telescopic lifting unit, a handle, a gear box and a transmission shaft;

[0024] The two ends of the transmission shaft are engaged with the lifting unit through the gear box;

[0025] The handle is arranged at one end of the lifting unit,

[0026] The rotation of the handle stretches or shrinks the lifting unit connected to the handle, and the stretching or shrinking movement of the lifting unit is transmitted to another lifting unit through the transmission unit composed of the gear box and the transmission shaft, realizing two Synchronous raising or lowering of the lifting unit.

[0027] see figure 1 , a synchronous lifting component includes a first lif...

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Abstract

The invention relates to a synchronous lifting component and a synchronous lifting and horizontal moving mechanism. The synchronous lifting component comprises a telescopic lifting unit, a handle, a gear box and a transmission shaft, wherein the two ends of the transmission shaft are meshed with the lifting unit through the gear box; the handle is arranged at one end of the lifting unit; the lifting unit connected with the handle is stretched or retracted by the rotation of the handle; and the stretching or retraction movement of the lifting unit is transferred to another lifting unit through a transmission unit composed of the gear box and the transmission shaft so as to realize synchronous ascending or descending of the two lifting units. In the synchronous lifting component and the synchronous lifting and horizontal moving mechanism provided by the invention, a transmission unit composed of two gear boxes and a transmission shaft realizes synchronization of two lifting units to ensure the stability of the lifting process; a pure-mechanical structure is adopted to lift an object; and each component has a simple structure, and the cost is low.

Description

technical field [0001] The invention relates to a lifting mechanism in a photolithography device, in particular to a synchronous lifting component and a synchronous lifting and horizontal moving mechanism. Background technique [0002] In the process of integration and maintenance of the lithography machine, it is often necessary to lift the mask table to a certain height and then move it in and out. It is very important to ensure the stability of the mask table lifting process. [0003] At present, the lifting mechanism mostly adopts hydraulic pressure, air pressure, electrical system including servo motor or electric hoist lifting. Because the lithography machine has relatively high requirements on the environment, the hoist using hydraulic or pneumatic methods is not suitable for lifting the mask table; the use of electrical systems including servo motors to lift the mask table is costly; and the electric hoist is used for lifting A mask table has no stability to speak o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B66F11/00F16H1/20G03F7/20
Inventor 唐广繁韩良华
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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