Sensor array readout circuit based on chopper technology

Abstract

The invention relates to a sensor array readout circuit based on a chopper technology. The sensor array readout circuit based on the chopper technology comprises a fully differential input stage. An input terminal of the fully differential input stage is connected with a signal modulation switch. An output terminal of the fully differential input stage is connected with a difference to single terminal signal switching stage through a signal demodulation switch. The difference to single terminal signal switching stage is connected with the output terminal of an output buffer stage through a first compensation capacitor. And the output terminal of the difference to single terminal signal switching stage is connected with a same-phase terminal of the output buffer stage. The same-phase terminal of the difference to single terminal signal switching stage is connected with the output terminal of the output buffer stage through a second compensation capacitor. An anti-phase terminal of the difference to single terminal signal switching stage is grounded through a third compensation capacitor and the anti-phase terminal of the output buffer stage is grounded. The circuit of the inventionhas a simple structure. An offset voltage and low frequency noises can be eliminated. An integration level of a system and a signal to noise ratio can be increased. A range of application is wide, safety and reliability can be achieved.

Description

technical field [0001] The invention relates to a readout circuit, in particular to a sensor array readout circuit based on chopper technology, which belongs to the technical field of weak signal detection. Background technique [0002] With the continuous improvement of the level of science and technology, the process technology of integrated circuits has been developed, which provides a guarantee for the microsystem in which the sensor and the readout circuit are integrated. With the continuous deepening of the application of micro-electro-mechanical systems in various fields of the country, people's performance requirements for micro-electro-mechanical systems are also getting higher and higher. It is specifically manifested in higher integration, higher signal-to-noise ratio, etc. [0003] For sensor signal detection, the first performance to consider is the signal-to-noise ratio of the sensor system. In the traditional sensor array detection system, capacitive transim...

Images