Discharge electrode used for capillary extreme ultraviolet photoetching light source

A technology of extreme ultraviolet lithography and discharge electrodes, which is applied to the main electrodes of discharge tubes, microlithography exposure equipment, and photolithography exposure devices, etc., which can solve problems such as distance changes, achieve simple changes, solve breakdown difficulties, and easily The effect of breakdown

Inactive Publication Date: 2012-06-13
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to solve the problem that the distance between two main pulse electrodes needs to be changed by changing the length of the capillary in the extreme ultraviolet lithography light source, the present invention provides a discharge electrode for the capillary extreme ultraviolet lithography light source

Method used

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  • Discharge electrode used for capillary extreme ultraviolet photoetching light source
  • Discharge electrode used for capillary extreme ultraviolet photoetching light source
  • Discharge electrode used for capillary extreme ultraviolet photoetching light source

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specific Embodiment approach 1

[0019] Specific implementation mode one: the following combination Figure 1 to Figure 3 Describe this embodiment mode, this embodiment mode is used for the discharge electrode of the capillary extreme ultraviolet lithography light source, it comprises the main pulse electrode segment 1 of adjustable length, the pre-pulse electrode segment 2 and the discharge electrode segment 3,

[0020] The pre-pulse electrode segment 2 is cylindrical,

[0021] One end of the pre-pulse electrode segment 2 is fixedly connected to one end of the discharge electrode segment 3, and the end face of the other end of the discharge electrode segment 3 is a concave spherical surface;

[0022] One end of the main pulse electrode segment 1 is inserted into it from the other end of the pre-pulse electrode segment 2, and is electrically connected with the pre-pulse electrode segment 2, and the other end of the main pulse electrode segment 1 is exposed outside the pre-pulse electrode segment 2, and its en...

specific Embodiment approach 2

[0027] Embodiment 2: This embodiment is a further description of Embodiment 1. The length adjustment range of the main pulse electrode segment 1 is greater than 0 mm and less than or equal to 14 mm.

[0028] The length adjustment range of the main pulse electrode section 1 is selected according to the length of the capillary, in order to realize the adjustable electrode distance in the capillary from 0 to 14 mm, so as to realize capillary discharge with different electrode distances.

specific Embodiment approach 3

[0029] Specific Embodiment 3: This embodiment is a further description of Embodiment 1 or 2. The section radius of the discharge electrode segment 3 is 1.5 mm.

[0030] The diameter of the pre-pulse electrode segment 2 only needs to be larger than the diameter of the main pulse electrode segment 1, so as to achieve a good socket installation between the two. The size of the section radius of the discharge electrode segment 3 is selected according to the inner diameter of the capillary, and the inner ring radius of the capillary is generally 0.5 mm to 10 mm, so the radius of the discharge electrode segment 3 is smaller than the inner radius of the capillary.

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Abstract

The invention, which belongs to the extreme ultraviolet photoetching light source technology field, relates to a discharge electrode used for a capillary extreme ultraviolet photoetching light source. Therefore, a problem that it is needed to use a mode of changing the length of a capillary to realize a change of a distance between two main pulse electrodes in an extreme ultraviolet photoetching light source can be solved. The discharge electrode comprises a main pulse electrode segment with an adjustable length, a prepulse electrode segment and a discharge electrode segment. The prepulse electrode segment is in a cylindrical shape; one end of the prepulse electrode segment is fixedly connected with one end of the discharge electrode segment; and the end surface of the other end of the discharge electrode segment is a concave spherical surface. One end of the main pulse electrode segment is inserted into the prepulse electrode segment from the other end of the prepulse electrode segment as well as is electrically connected with the prepulse electrode segment; the other end of the main pulse electrode segment is exposed outside the prepulse electrode segment; and the end of the main pulse electrode segment has a tip. And the discharge electrode segment is in a columnar shape; and a range of a section radius of the discharge electrode segment is from 0.2mm to 3.5 mm. According to the invention, the provided discharge electrode is used as one for extreme ultraviolet photoetching light source.

Description

technical field [0001] The invention relates to a discharge electrode used for a capillary extreme ultraviolet lithography light source, and belongs to the technical field of extreme ultraviolet lithography light sources. Background technique [0002] The capillary discharge ultraviolet EUV (Extreme Ultraviolet) lithography light source refers to the 13.5nm (2% bandwidth) radiation light output obtained under the capillary discharge Z-pinch mechanism using Xe medium. The 13.5nm wavelength radiation light can realize 22nm or even smaller lithography lines. [0003] The specific formation process of the 13.5nm wavelength radiation light is as follows: during the capillary discharge process, the high voltage will form a layer of Xe plasma shell along the inner surface wall in the capillary, and when the main pulse discharges, through the plasma The strong current is affected by its own magnetic field, which will generate a strong Lorentz force, which makes the plasma pinch in ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J1/02G03F7/20
Inventor 赵永蓬徐强王骐
Owner HARBIN INST OF TECH
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