Phase-shift diffraction/interference measuring instrument and method for detecting three-dimensional shape of microsphere

A technology of three-dimensional shape and interferometric measurement, which is applied in the direction of measuring devices, instruments, and optical devices, etc. It can solve the problems of difficulty in manufacturing an ideal spherical surface of the reference surface, and the small detection range of a single measurement.

Active Publication Date: 2012-06-27
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to solve the problems of small detection range of a single measurement and difficulty in making an ideal sphere as a reference surface in traditi

Method used

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  • Phase-shift diffraction/interference measuring instrument and method for detecting three-dimensional shape of microsphere
  • Phase-shift diffraction/interference measuring instrument and method for detecting three-dimensional shape of microsphere
  • Phase-shift diffraction/interference measuring instrument and method for detecting three-dimensional shape of microsphere

Examples

Experimental program
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Example Embodiment

[0039] Specific implementation mode 1: the following combination figure 1 To explain this embodiment, the phase-shift diffraction interferometer used for detecting the three-dimensional shape of a tiny spherical surface in this embodiment includes a short-coherent laser 1, a half-wave plate 2, a polarizer 3, a first four Half-wave plate 4-1, second quarter-wave plate 4-2, right angle retardation prism 5, polarization beam splitter 6, analyzer 7, fiber coupler 8, single-mode single-core fiber 9, right angle shift Phase prism 10, convergent lens 12, pinhole sheet 13, knife-edge reflector 14, microscope objective lens 15, large-size CCD 16 and computer 17,

[0040] The emitted laser beam of the short-coherent laser 1 passes through the half-wave plate 2 and the polarizer 3 to form polarized light. The polarized light is incident on the polarizing beam splitter 6 and then divided into two beams. The transmitted beam passes through the second quarter A wave plate 4-2 is incident on th...

Example Embodiment

[0049] Specific implementation manner 2: the following combination figure 1 To illustrate this embodiment, this embodiment is a further description of the first embodiment. It also includes a vacuum adsorption two-dimensional turntable 18, the vacuum adsorption two-dimensional turntable 18 is used to place the measured microballs, the vacuum adsorption of the two-dimensional turntable 18 The turntable control signal input terminal is connected to the two-dimensional turntable control signal output terminal of the computer 17.

[0050] The rotation center of the vacuum adsorption two-dimensional turntable 18 is located on the main optical axis of the microscope objective lens 15.

Example Embodiment

[0051] Specific implementation manner three: the following combination figure 1 This embodiment is described. This embodiment is a further description of the first or second embodiment. It also includes a micro-displacement drive platform 11, the table of the micro-displacement drive platform 11 is rigidly connected to the right-angle phase shifting prism 10, and the micro-displacement drive platform 11 The displacement control signal input terminal is connected to the displacement control signal output terminal of the computer 17.

[0052] The right-angle phase-shifting prism 10 is rigidly connected to the table surface of the micro-displacement driving platform 11. Driven by the micro-displacement driving platform 11, the right-angle phase-shifting prism 10 can move parallel to the optical axis of the incident beam.

[0053] The micro-displacement drive platform 11 in this embodiment can be a special phase-shifting platform model S-303 made by German PI company, and its displaceme...

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Abstract

The invention relates to a phase-shift diffraction/interference measuring instrument and a phase-shift diffraction/interference measuring method for detecting a three-dimensional shape of a microsphere, and belongs to the technical field of optical detection of three-dimensional shapes of space objects. Through the instrument and the method, the problems that the detection range of single measurement is narrow and an ideal sphere which serves as a reference surface is difficult to manufacture in the conventional way for detecting the microsphere are solved. The measuring instrument comprises a short-coherence laser, a half wave plate, a polarizer, a first quarter wave plate, a second quarter wave plate, a right angle delay prism, a polarization beam splitter, a polarization analyzer, an optical fiber coupler, a single-mode single-core optical fiber, a right angle phase-shift prism, a converging lens, a pinhole sheet, a knife-edge reflector, a microscope objective, a large-size charge coupled device (CCD) and a computer. According to the measuring method, a light path is formed by the measuring instrument, and the detected microsphere is adjusted to rotate so as to acquire shape parameters of the corresponding microsphere to ensure that the shape of the microsphere is detected. The measuring instrument and the measuring method are suitable for detecting three-dimensional shapes of microspheres.

Description

technical field [0001] The invention relates to a phase-shifting diffraction interferometer and a measuring method for detecting the three-dimensional shape of a microsphere, belonging to the technical field of optical detection of the three-dimensional shape of a space object. Background technique [0002] As one of the most commonly used forms of components, microspheres are widely used in aerospace, military, industrial, medical and other fields. The surface accuracy of microspheres has a crucial impact on their performance. Although traditional detection methods for tiny spherical surfaces, such as atomic force microscopes and confocal microscopes, have high longitudinal measurement accuracy, when the single measurement range is very small and high-precision mechanical scanning motion devices are required to achieve overall three-dimensional shape measurement At the same time, the detection results are seriously affected by mechanical motion errors. At the same time, due...

Claims

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Application Information

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IPC IPC(8): G01B9/02G01B11/24
Inventor 陈凤东刘炳国刘国栋胡涛庄志涛卢丙辉宫娜
Owner HARBIN INST OF TECH
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