Short-coherence transient phase-shifting interferometer and measurement method for rapid detection of microsphere surface topography

Abstract

The invention discloses a short coherence instantaneous phase-shifting interferometer and measuring method for microsphere surface morphology rapid detection and relates to the field of optical detection space object three-dimensional morphologies. The short coherence instantaneous phase-shifting interferometer for the microsphere surface morphology rapid detection and the measuring method solve the problems that existing similar technologies are low in detecting efficiency and poor in lateral resolution capability, low in precision, isolated defect points are easy to omit, reference planes are difficult to manufacture and the like. According to the short coherence instantaneous phase-shifting interferometer, reference light is transmitted through a single mode optical fiber to an optical fiber collimator, the reference light forms incident reference light beams after being collimated, measuring light beams are reflected for many times and form incident measuring light beams which are perpendicular to the incident reference light beams, the incident reference light beams and the incident measuring light beams are combined after entering a third polarization splitting prism and are divided into four parallel light beams sequentially through a fourth splitting prism and a fifth polarization splitting prism, and different phase-shifting quantities are respectively added to the four parallel light beams through a wave plate array and form four optical spots on an area array charge coupled device (CCD). According to the measuring method, image processing is carried out through the four optical spots, and therefore the spherical surface morphology of the detected microsphere can be obtained. The short coherence instantaneous phase-shifting interferometer is applicable to rapid detection of the microsphere surface morphology.

Description

technical field [0001] The invention relates to the technical field of optically detecting the three-dimensional shape of a space object. Background technique [0002] As one of the most commonly used component shapes, microspheres are used in many fields such as aerospace, military, industry, and medical treatment. The accuracy of their surface shape has a crucial impact on their performance. Although traditional detection methods, such as atomic force microscopes and confocal microscopes, have high longitudinal measurement accuracy, when the single measurement range is very small and high-precision mechanical scanning motion devices are required to achieve overall three-dimensional shape measurement, they are affected by mechanical motion. The impact of errors is serious, and at the same time, due to the single-point scanning measurement, there are problems such as low detection efficiency, poor lateral resolution ability, and isolated defect points are easy to miss. Howe...

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Problems solved by technology

[0003] The present invention aims to solve the problem that the detection range of a single measurement is too small, it is easy to miss isolated defect points, the manufacturing of the reference surface is difficult and the precision is not high, the contrast of the interference field is low, and the traditional time-domain phase-shifting interferometry is limited in the measurement of the micro-spherical surface topography. Environmental factors (vibration, air disturbance) seriously affect the problem, and then provide a short-coherence instantaneous phase-shifting interferometer and measurement method for rapid detection of microsphere surface topography

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