Short-coherence transient phase-shifting interferometer and measurement method for rapid detection of microsphere surface topography
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A technology of surface topography and phase-shifting interference, applied in measurement devices, instruments, optical devices, etc., can solve the problems of easy omission of isolated defect points, low contrast of interference field, difficulty in manufacturing reference surface, etc., to improve anti-interference ability , High degree of automation, the effect of increasing the coverage area
Active Publication Date: 2015-11-11
HARBIN INST OF TECH
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[0003] The present invention aims to solve the problem that the detection range of a single measurement is too small, it is easy to miss isolated defect points, the manufacturing of the reference surface is difficult and the precision is not high, the contrast of the interference field is low, and the traditional time-domain phase-shifting interferometry is limited in the measurement of the micro-spherical surface topography. Environmental factors (vibration, air disturbance) seriously affect the problem, and then provide a short-coherence instantaneous phase-shifting interferometer and measurement method for rapid detection of microsphere surface topography
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specific Embodiment approach 1
[0024] Specific implementation mode one: combine figure 1 Describe this embodiment, the short-coherence instantaneous phase-shifting interferometer for rapid detection of microsphere surface topography described in this embodiment includes a short-coherence laser 1, a spatial filter 2, and a first λ / 2 wave plate 3 , the first polarization beam splitter prism 4, λ / 4 wave plate 5, microscope objective lens 6, microsphere 7, the second λ / 2 wave plate 10, the second polarization beam splitter prism 11, fiber coupler 12, single-mode fiber 13, Fiber collimator 14, the first plane reflector 15, 180 ° steering angle cube prism 16, the second plane reflector 17, the third polarization beam splitter prism 18, the third plane reflector 19, the fourth polarization beam splitter prism 20, the first Five polarization beam splitters 21, wave plate array 22, polarizer 23, area array CCD optical sensor 24 and computer 25;
[0025] The spatial filter 2, the first λ / 2 wave plate 3, the first po...
specific Embodiment approach 2
[0029] Embodiment 2: This embodiment further defines the short-coherence instantaneous phase-shifting interferometry instrument for rapid detection of microsphere surface topography described in Embodiment 1. In this embodiment, the short-coherence laser 1 emits The wavelength of the laser beam is 523nm, the coherence length is 1mm, the output power is greater than 0 and less than 300mw, and it is continuously adjustable.
specific Embodiment approach 3
[0030] Specific embodiment three: this embodiment is further limited to the short-coherent instantaneous phase-shifting interferometer for rapid detection of microsphere surface topography described in specific embodiment one or two, the microscopic objective lens 6 described in this embodiment is 20 times magnification objective lens, the numerical aperture of the objective lens is 0.4.
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Abstract
The invention discloses a short coherence instantaneous phase-shifting interferometer and measuring method for microsphere surface morphology rapid detection and relates to the field of optical detection space object three-dimensional morphologies. The short coherence instantaneous phase-shifting interferometer for the microsphere surface morphology rapid detection and the measuring method solve the problems that existing similar technologies are low in detecting efficiency and poor in lateral resolution capability, low in precision, isolated defect points are easy to omit, reference planes are difficult to manufacture and the like. According to the short coherence instantaneous phase-shifting interferometer, reference light is transmitted through a single mode optical fiber to an optical fiber collimator, the reference light forms incident reference light beams after being collimated, measuring light beams are reflected for many times and form incident measuring light beams which are perpendicular to the incident reference light beams, the incident reference light beams and the incident measuring light beams are combined after entering a third polarization splitting prism and are divided into four parallel light beams sequentially through a fourth splitting prism and a fifth polarization splitting prism, and different phase-shifting quantities are respectively added to the four parallel light beams through a wave plate array and form four optical spots on an area array charge coupled device (CCD). According to the measuring method, image processing is carried out through the four optical spots, and therefore the spherical surface morphology of the detected microsphere can be obtained. The short coherence instantaneous phase-shifting interferometer is applicable to rapid detection of the microsphere surface morphology.
Description
technical field [0001] The invention relates to the technical field of optically detecting the three-dimensional shape of a space object. Background technique [0002] As one of the most commonly used component shapes, microspheres are used in many fields such as aerospace, military, industry, and medical treatment. The accuracy of their surface shape has a crucial impact on their performance. Although traditional detection methods, such as atomic force microscopes and confocal microscopes, have high longitudinal measurement accuracy, when the single measurement range is very small and high-precision mechanical scanning motion devices are required to achieve overall three-dimensional shape measurement, they are affected by mechanical motion. The impact of errors is serious, and at the same time, due to the single-point scanning measurement, there are problems such as low detection efficiency, poor lateral resolution ability, and isolated defect points are easy to miss. Howe...
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