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Linear platform of double-shaft floating stator

A linear platform and stator technology, applied in electrical components, semiconductor/solid-state device manufacturing, circuits, etc., to achieve the effect of improving positioning accuracy, avoiding impact, and improving positioning accuracy and measurement accuracy

Inactive Publication Date: 2012-06-27
DG HUST MFG ENG RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But the vibration of the platform is still very obvious, the reaction force on the base is still not weakened when the motor is working, and the vibration of the base is still not able to stop

Method used

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  • Linear platform of double-shaft floating stator
  • Linear platform of double-shaft floating stator
  • Linear platform of double-shaft floating stator

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] The dual-axis floating stator linear platform of the present invention will be further described in detail below in combination with preferred embodiments.

[0020] see figure 2 The shown two-axis floating stator linear platform includes a base 1 on which a driving device in a first direction and a driving device in a second direction are fixed, and is connected with the driving device in the first direction and the driving device in the second direction. Workbench 4 to which the device is attached. When the driving motor in the first direction driving device and the second direction driving device drives the workbench 4 to move, the first direction driving motor stator and the second direction driving motor stator move along the opposite direction of the movement direction of the workbench 3 , to buffer the reverse force caused by driving the table 3, so that the reaction force does not cause impact on the base 1, thereby affecting the positioning accuracy.

[0021]...

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PUM

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Abstract

The invention provides a linear platform of a double-shaft floating stator, which comprises a base, a first direction driving device, a second direction driving device and a working platform connected with the first direction driving device and the second direction driving device are fixed on the base; when the drive motors in the first direction driving device and the second direction driving device drive the working platform to move, the stators of the drive motors move along a direction opposite to the movement direction of the working platform. According to the invention, when the rotors of the drive motors propel the working platform to move, the stators of the drive motors drive a stator to slide toward a direction opposite to the movement direction of the working platform instead of directly acting on the base of the platform under the counterforce of the stators of the drive motors so as to avoid the impact on the base and improve the locating precision and the measuring precision of the linear platform, and the linear platform can be located at a micron level of locating precision.

Description

technical field [0001] The invention relates to the fields of mechanical processing and measurement, and is a high-speed and high-precision positioning device. Background technique [0002] The high-speed and high-precision precision micro-displacement worktable system occupies an extremely important position in the modern semiconductor industry and scientific research fields. The positioning accuracy and travel range of the precision micro-displacement table system directly affect the accuracy and processing capacity of production and processing. At the same time, the speed and acceleration of the workbench and the stabilization time of the start-stop process affect the efficiency of the equipment and become important indicators of the system. [0003] The traditional linear motion stage is usually driven by a rotating motor through a screw to drive the table in a linear motion. Because the screw in the middle link has a maximum speed limit and backlash, it is difficult to...

Claims

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Application Information

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IPC IPC(8): H01L21/67H01L21/68
Inventor 王红禹新路李泽湘高宜铭潘明
Owner DG HUST MFG ENG RES INST
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