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Measurement device of scanning probe

A measuring device and scanning technology, applied in the field of precision measurement, can solve the problems of friction influence, slow measurement speed, complex structure, etc., and achieve the effect of less interference, no friction influence, and small volume

Active Publication Date: 2012-07-04
BEIJING UNIV OF TECH
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Problems solved by technology

[0005] The purpose of the present invention is to overcome the disadvantages of the existing scanning probe sensor, such as low precision, frictional force, complex structure and slow measurement speed, and propose a method using a grating displacement sensor and a double-parallel reed structure as a guiding mechanism. Scanning probing device for horizontal installation for dimensional measurement

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  • Measurement device of scanning probe

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Embodiment Construction

[0026] A scanning probe measurement device proposed by the present invention will be described in detail below in conjunction with the accompanying drawings.

[0027] Such as figure 1 As shown, the entire raster scanning system is divided into two parts, the mechanical probe part and the raster signal processing part installed inside the computer host. The whole mechanical main body 4 is protected by the shell 2 and the back cover 5, the mechanical main body 4 is fixed on the shell 2 by screws, and the back cover 5 is designed with a mounting handle 6, which is convenient for the installation and use of the probe. The grating cable 7 used to transmit the grating signal is led out from the reserved hole on the back cover 5 of the probe, and connected to the grating signal interface 15 of the signal processing system. The grating signal processing system is distributed with a power conversion module 11, an amplification and shaping module 14, an FPGA module 12, and a DSP module...

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Abstract

The invention relates to a measurement device of a scanning probe, belonging to the field of precision measurement and being applicable to the measurement of micro-displacements and two-dimensional small sizes. The measurement device comprises a mechanical probe part and a grating signal processing part, wherein the mechanical probe part comprises two layers of parallel spring leaf structures, and the two layers of parallel spring leaf structures are vertical to each other. The measurement device of the scanning probe, provided by the invention, has the advantages that: the measurement device is simple and compact in structure, small in volume, light in weight and free of frictional influence during moving; the defects of complicated structure and inconvenience in use of the traditional scanning probe are avoided; and compared with the traditional parallel spring leaf combinatorial structure adopting a floor-type structure, the measurement device is more suitable for measuring by being horizontally mounted and is dispensable of a gravity balancing mechanism.

Description

technical field [0001] The invention relates to a scanning probe measuring device, which is suitable for micro-displacement measurement and two-dimensional micro-size measurement, and belongs to the field of precision measurement. Background technique [0002] The probe is the key component of the coordinate measuring machine, and its performance directly affects the measurement accuracy and work efficiency of the coordinate measurement. The scanning probe, also known as the linear probe, is different from the trigger probe in that when the stylus of the probe touches the workpiece, it not only sends an aiming signal, but also gives the micro-displacement of the measuring end, that is, it has both aiming and micrometric function. The technical key of this type of measuring head is whether it can provide a micro-guide rail system with no friction, no return error and high sensitivity. The output of the scanning probe is proportional to the offset of the stylus, and it has t...

Claims

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Application Information

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IPC IPC(8): G01B11/00
Inventor 陈洪芳石照耀郑智伟
Owner BEIJING UNIV OF TECH
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