Rotor type micromachined gyroscope with electromagnetic drive frame structure

Abstract

The utility model relates to a rotor type micromechanical gyroscope with an electromagnetically-driven framework structure, which comprises a metal disc rotor of the micromechanical gyroscope, and a stator of the micromechanical gyroscope, wherein the metal disc rotor and the stator are magnetized radially; and the metal disc rotor of the micromechanical gyroscope is positioned in the center inside the stator of the micromechanical gyroscope. The rotor type micromechanical gyroscope with the electromagnetically-driven framework structure is characterized by further comprising an upper cross-shaped supporting framework, a lower cross-shaped supporting framework, a plurality of coils, eight piezoelectric structures, a first shaft, a second shaft, a first bearing and a second bearing, wherein the metal disc rotor of the micromechanical gyroscope is positioned in the central positions of the upper cross-shaped supporting framework and the lower cross-shaped supporting framework, the first shaft and the second shaft are positioned in the positions of the circle centers of the upper surface and the lower surface of the metal disc rotor of the micromechanical gyroscope respectively, the first bearing is integrally connected with the central position of the upper cross-shaped supporting framework, the second shaft is integrally connected with the central position of the lower cross-shaped supporting framework, and the first shaft and the first bearing are concentric with the circle center of the metal disc rotor of the micromechanical gyroscope. The rotor type micromechanical gyroscope with the electromagnetically-driven framework structure has the characteristics of simple structure, easeness in assembly and high reliability, is small in volume, low in cost and high in sensitivity, and is easy to realize.

Description

technical field [0001] The invention relates to a micro-gyroscope in the technical field of micro-electro-mechanical systems, in particular to a rotor-type micro-mechanical gyroscope with an electromagnetically driven frame structure. Background technique [0002] A gyroscope is a sensing device that measures the angle or velocity of an object relative to inertial space. In the past two decades, with the development of MEMS technology, MEMS micro gyroscopes have become more popular due to the advantages of MEMS devices such as small size, light weight, low power consumption, impact resistance, and can be applied to relatively harsh environmental conditions. It has become one of the main development directions of gyroscope technology in the future. However, the vibrating MEMS gyroscope is limited by size reduction and processing precision, and the bias stability stagnates at a medium precision level of about 1° / h, making it difficult to continue to improve its performance. ...

AI Technical Summary

Problems solved by technology

The suspended rotor micro-gyroscope proposed in this invention has the disadvantages of using electrostatic or electromagnetic levitation without support structure, poor axial positioning and motion stability, and requires a complex control system.

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