High-precision electromigration early warning circuit

An electromigration, high-precision technology, applied in the direction of measuring resistance/reactance/impedance, measuring electrical variables, measuring devices, etc., can solve the problems that the size is difficult to control accurately, difficult to realize, and the resistance size cannot be precisely controlled, so as to achieve easy realization, High precision, easy to popularize and apply the effect
CN102590629AActive Publication Date: 2012-07-18CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
CHINA ELECTRONICS PROD RELIABILITY & ENVIRONMENTAL TESTING RES INST
Publication Date
2012-07-18

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Abstract

The invention discloses a high-precision electromigration early warning circuit, which comprises an interconnection wire testing structure, a two-stage low-gain amplifier, a high-gain comparator and an output stage. An output end of the interconnection wire testing structure is connected with an input end of the two-stage low-gain amplifier; an output end of the two-stage low-gain amplifier is connected with an input end of the high-gain comparator; and an output end of the high-gain comparator is connected with the output stage.
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Description

technical field

[0001] The invention relates to an early warning circuit, in particular to an electromigration early warning circuit. Background technique

[0002] In the context of shrinking feature size, increasing integration and chip area, and increasing actual power consumption, the approach of physical limits increases the sensitivity of various failure mechanism effects that affect the reliability of integrated circuits, which need to be considered and weighed in design and process The factor increases greatly, and the reliability margin tends to disappear, so that the reliability problem faces a huge challenge. Among many integrated circuit reliability problems, the electromigration of metal interconnection is one of the main reasons for the failure of integrated circuits. Electromigration can easily cause open and short circuits of metal wires, resulting in changes in the resistance value of interconnection lines. In the case that the size of the device is continuo...

Claims

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