Lead-free piezoelectric film material and preparation method thereof

A thin-film material, lead-free piezoelectric technology, applied in the field of functional ceramic materials, can solve the problems of high sol viscosity, film micro-cracks, poor insulation, etc. Effect

Inactive Publication Date: 2012-07-25
HEFEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the sol-gel method to prepare BaTiO 3 The base piezoelectric film uses acetylacetone as a chelating agent, but the viscosity of the sol prepared by using acetylacetone as a chelating agent is too high, so it is not easy to form a film
Films prepared by the sol-gel method, due to the existence of internal stress, use improper heating or cooling rates during annealing, which may easily cause film cracking
In additio

Method used

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  • Lead-free piezoelectric film material and preparation method thereof
  • Lead-free piezoelectric film material and preparation method thereof
  • Lead-free piezoelectric film material and preparation method thereof

Examples

Experimental program
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Embodiment Construction

[0027] Non-limiting examples are described as follows:

[0028] The raw materials required for the experiment are barium acetate (analytical pure, content 99%), calcium acetate (analytical pure, content 98%), strontium acetate (analytical pure, content 99%), tetrabutyl titanate (chemically pure, content 98%) %), niobium citrate (analytical pure, content 99%), ferric citrate (analytical pure, content 99%). Reagents Glacial acetic acid (analytical pure, content 99%), ethylene glycol dimethyl ether (analytical pure, content 99%), formamide (analytical pure, content 99%).

[0029] 1. To prepare 0.1mol / l, 40ml of (Ba 0.9 Ca x Sr 0.1-x )(Ti 0.87 Nb y Fe 0.13-y )O 3 Sol is taken as an example, and each raw material is weighed separately according to the mol ratio for later use.

[0030] Weigh barium acetate, calcium acetate and strontium acetate according to the weight calculated above and dissolve them in 20 ml of glacial acetic acid, stir the mixed solution on a magnetic st...

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Abstract

The invention discloses a lead-free piezoelectric film material, which is a ferrocolumbium barium titanate calcium strontium film material with the ingredient and chemical formula of (Ba0.9CaxSr0.1-x)(Ti0.87Nbyfe0.13-y)O3, wherein x in the formula is more than 0 and is less than 0.1, and y is more than 0 and is less than 0.13. The material is obtained by that sol is prepared with an improved sol-gel method, and the sol is subjected to film formation by the spin-coating technology and is annealed. The piezoelectric coefficient d33 of the material is 320pC/N. In addition, the lead-free piezoelectric film material has the advantages of low leakage current, dense surface, even grain size, strong electric hysteresis effect and the like and is free from the microcrack. The lead-free piezoelectric film material has an important meaning for applying the ferroelectric film in the micro-electronics field.

Description

1. Technical field [0001] The invention relates to a functional ceramic material, especially a piezoelectric material and a processing method thereof, in particular to a lead-free piezoelectric thin film material and a preparation method thereof. 2. Background technology [0002] Piezoelectric material refers to the material with piezoelectric effect, and its main characteristic is electrostriction, that is, the material will deform due to the change of electric current. Because of this characteristic, piezoelectric materials have become important functional materials, and they have been widely used in dielectric materials, sensors and actuators. The integration of piezoelectric ceramics will have a wider range of applications. It can be used as a material for phase shifters, delay lines, adjustable filters and non-volatile piezoelectric memories in microelectronics technology. Actuator and sensor materials. Piezoelectric thin film materials have become an important choice...

Claims

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Application Information

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IPC IPC(8): C04B35/468C04B35/622
Inventor 石敏钟家刚许育东王雷
Owner HEFEI UNIV OF TECH
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